Block Copolymer Phase Separation via Neutralization Film

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Solution Overview

Problem

Existing methods for forming large patterns using phase-separated structures from block copolymers face challenges in achieving desired patterns due to variations in phase-separated patterns when increasing molecular weight.

Innovation Solution

A method involving the application of a neutralization film on a substrate, followed by a block copolymer with a weight average molecular weight of 150,000 or more and a coating film thickness of 23 nm or less, to control the phase-separation and orientation of the block copolymer structure, allowing for the formation of a phase-separated structure with a desired pattern.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the molecular weight of the block copolymer is increased to form larger patterns, then the pattern size is improved, but the uniformity and reliability of the phase-separated pattern deteriorates due to large variations

Engineering Contradiction:

Improvepattern sizeVSAvoidpattern uniformity

Core Design Contradiction:

Volume of moving objectVSReliability

Solution Approach 1:

The patent applies parameter changes by precisely controlling the molecular weight of the block copolymer to be 150,000 or more, and controlling the coating film thickness to be extremely thin (23 nm or less). These specific parameter thresholds resolve the contradiction by enabling large pattern formation while maintaining pattern uniformity through optimized molecular weight and thickness parameters that ensure consistent self-assembly behavior.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent applies preliminary action by forming a neutralization film on the substrate before applying the block copolymer. This pre-treatment step modifies the substrate surface to provide uniform nucleation sites and control the initial self-assembly process, thereby ensuring reliable and uniform phase-separated patterns even when using high molecular weight block copolymers for large pattern formation.

Inventive Principle:

Principle #10Preliminary action

2Length of stationary object

If the molecular weight is increased to achieve larger patterns, then the pattern dimension is improved, but the manufacturing precision deteriorates due to desired pattern formation failure

Engineering Contradiction:

Improvepattern dimensionVSAvoidpattern formation accuracy

Core Design Contradiction:

Length of stationary objectVSManufacturing precision

Solution Approach 1:

The patent resolves this contradiction by establishing specific parameter thresholds: molecular weight of 150,000 or more for adequate chain length and interfacial curvature control, and coating film thickness of 23 nm or less for confined self-assembly. These parameter changes enable large pattern dimensions while maintaining manufacturing precision through controlled phase separation.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The neutralization film serves as an intermediary between the substrate and the block copolymer. It mediates the interaction by providing a controlled interface that promotes uniform phase separation and accurate pattern formation, enabling precise manufacturing of large patterns that would otherwise fail to form correctly with high molecular weight materials.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Adaptability or versatility

If a thicker coating film is used to accommodate high molecular weight block copolymer, then the applicability is improved, but the orientation control and pattern uniformity worsen

Engineering Contradiction:

Improvecoating applicabilityVSAvoidorientation control

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by setting the coating film thickness to an extremely thin value of 23 nm or less, even when using high molecular weight block copolymers. This counterintuitive parameter choice maintains orientation control and pattern uniformity by confining the self-assembly process to a thin film where substrate effects and neutralization film guidance remain effective, while still accommodating the high molecular weight material through optimized coating conditions.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of a phase-separated structure with a large, uniform, and desired pattern, overcoming the issue of pattern variation associated with increased molecular weight, and allows for perpendicular orientation of cylindrical structures, which was previously difficult to achieve.

Implementation Method 1

A block copolymer forms a regular periodic structure by phase separation

Methodology Applied

Scientific EffectPhase separation:

Implementation Method 2

chemical epitaxy to control phase-separated pattern by difference in the chemical state of the substrate

Methodology Applied

Scientific EffectChemical epitaxy:

Data Source

PatentUS9475088B2Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition

Publication Date: 2016.10.25 TOKYO OHKA KOGYO CO LTD

AI summary

A method of producing a structure containing a phase-separated structure, including applying a neutralization film to a substrate to form a layer of a neutralization film; applying a block copolymer having a plurality of polymers bonded thereto, and a weight average molecular weight of 150,000 or more to the layer of the neutralization film, so as to form a layer containing the block copolymer and having a coating film thickness of 23 nm or less; and phase-separating the layer containing the block copolymer.