Block Copolymer Resin Composition for Vertical Phase Separation
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Solution Overview
Problem
Existing block copolymers struggle to form phase-separated structures with excellent vertical orientation, which is essential for finer pattern formation in large-scale integrated circuits.
Innovation Solution
A resin composition comprising a block copolymer with a specific structure, including a first block composed of a polymer with a repeating unit and a second block composed of a random copolymer, where the volume ratio of the first block to the total volume of both blocks is between 20% and 80%, facilitating the formation of vertically oriented phase-separated structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If a block copolymer with high molecular weight is used to increase structural period, then the structural period increases, but the phase-separated structure cannot achieve vertical orientation
Solution Approach 1:
The invention changes the chemical composition parameters of the block copolymer by incorporating fluorinated groups and controlling the volume ratio of blocks to achieve both large structural period and vertical orientation simultaneously, rather than relying solely on molecular weight adjustment
Solution Approach 2:
The invention creates a composite block copolymer structure combining hydrocarbon blocks and fluorinated blocks with specific volume ratios (20-80%), forming a multi-component system that achieves both large period and vertical orientation through compositional design
2Reliability
If the interaction parameter χ is increased to enhance phase separation performance, then phase separation performance improves, but the ability to form vertically oriented structures is lost
Solution Approach 1:
The invention introduces fluorinated groups to modify the interaction parameter χ while simultaneously controlling block volume ratios, changing the chemical composition parameters to achieve both strong phase separation and vertical orientation
Solution Approach 2:
The invention creates local compositional differences by incorporating fluorinated groups in specific blocks with controlled volume ratios, making different parts of the copolymer have different properties that collectively enable vertical orientation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed resin composition effectively forms phase-separated structures with excellent vertical orientation, enabling the creation of finer patterns suitable for advanced microelectronics.
Implementation Method 1
a technique for forming a finer pattern utilizing a phase-separated structure formed by self-organization of a block copolymer in which blocks incompatible with each other are bonded
Implementation Method 2
formed by self-organization of a block copolymer
Data Source
AI summary
A resin composition for forming a phase-separated structure, the resin composition including a block copolymer having a first block and a second block, the first block including a polymer having a repeating structure of a constituent unit represented by the following formula (b1), the second block including a random copolymer having a structure in which a constituent unit represented by the following formula (b2a) and a constituent unit represented by the following formula (b2b) are randomly arranged, and a ratio of a volume of the first block being 20% by volume or more and 80% by volume or less