Block Copolymer Composition for Vertical Nanostructure Orientation

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Solution Overview

Problem

Existing block copolymer technologies face challenges in orienting self-assembled nanostructures vertically on substrates without the use of a neutral layer, as the orientation is typically determined by the polarity of the blocks and the substrate, limiting their application in high-density pattern formation and nanowire fabrication.

Innovation Solution

A polymer composition comprising a block copolymer with specific polymer segments that satisfy conditions such as controlled surface energy, melting transition peaks, and X-ray diffraction patterns, allowing for vertical orientation of self-assembled structures on substrates without a neutral layer, by ensuring that both polymer segments are wetted on the substrate, thereby achieving perpendicular orientation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a neutral layer is used to achieve vertical orientation of block copolymer structures, then the vertical orientation is achieved, but the device complexity and manufacturing steps increase

Engineering Contradiction:
Improvevertical orientation of nanostructuresVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent removes the neutral layer component from the system entirely. By designing block copolymers with specific asymmetric structures where one block has strong substrate interaction capability, the vertical orientation function is achieved without the neutral layer, thus simplifying the overall device structure while maintaining the desired orientation precision

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the chemical structure parameters of the block copolymer itself, specifically designing asymmetric structures with blocks having different interaction strengths with the substrate. This parameter change in the polymer structure allows direct vertical orientation on the substrate without requiring an additional neutral layer, resolving the contradiction between orientation precision and device complexity

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If a neutral layer is formed on the substrate, then vertical orientation is achieved, but the manufacturing process becomes more complex and time-consuming

Engineering Contradiction:
Improvevertical orientation of nanostructuresVSAvoidfabrication time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent extracts and eliminates the neutral layer formation step from the manufacturing process. By incorporating vertical orientation capability directly into the block copolymer structure through asymmetric design, the multi-step process of neutral layer formation is removed, significantly reducing fabrication time while maintaining vertical orientation precision

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent performs preliminary action by pre-designing the block copolymer with asymmetric structures that inherently provide vertical orientation capability. This preliminary structural design eliminates the need for subsequent neutral layer formation steps, reducing overall process time while ensuring precise vertical orientation from the outset

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If block copolymer structures are oriented horizontally on polar substrates, then the self-assembly process is simple, but the application in high-density pattern formation is limited

Engineering Contradiction:
Improveself-assembly process simplicityVSAvoidapplication versatility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent changes the interaction parameters between the block copolymer and substrate by designing blocks with specific chemical groups and interaction strengths. This parameter change enables the system to achieve vertical orientation on polar substrates without sacrificing self-assembly simplicity, thereby expanding application versatility to include high-density pattern formation and nanowire fabrication

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite system where the block copolymer is designed with multiple functional blocks having different properties. This composite structure allows one block to interact strongly with the polar substrate for vertical orientation while maintaining the self-assembly capability, thus achieving both ease of manufacture and broad application versatility

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The polymer composition enables the formation of highly aligned, vertically oriented self-assembled structures, enhancing the application of block copolymers in nanowire fabrication and high-density pattern formation without the need for a neutral layer, improving the precision and efficiency of substrate patterning.

Implementation Method 1

The block copolymer can form a periodically arranged structure such as a sphere, a cylinder or a lamella by phase separation

Methodology Applied
Scientific EffectPhase separation:

Implementation Method 2

a block having a larger polarity among the blocks of the block copolymer is wetted to the substrate

Methodology Applied
Scientific EffectWetting: Wetting

Implementation Method 3

The shape and size of the domain of the structure formed by a directed self-assembly phenomenon of the block copolymer

Methodology Applied
Scientific EffectSelf-assembly: Self-Assembly

Data Source

PatentUS11613599B2Polymer composition
Publication Date: 2023.03.28 LG CHEM LTD
  • US11613599B2 patent drawing
  • US11613599B2 patent drawing
  • US11613599B2 patent drawing

AI summary

Methods for forming a laminate are provided. The method provides a highly aligned block copolymer without orientation defects, coordination number defects distance defects and the like on a substrate, thereby providing a laminate which can be effectively applied to the production of various patterned substrates, and a method for producing a patterned substrate using the same.