Blocking Member Low Oxygen Atmosphere Substrate Processing
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Solution Overview
Problem
Existing substrate processing methods fail to effectively prevent oxidation of pattern forming surfaces before the formation of a solidified film and ensure smooth filler supply, leading to potential pattern collapse and defects.
Innovation Solution
A substrate processing method involving a blocking member with a circular cylindrical portion that creates a low oxygen atmosphere, allowing chemical liquid processing under controlled conditions, followed by smooth filler discharge and spreading to form a solidified film, while protecting the pattern forming surface with intermediate processing liquids.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the pattern forming surface is exposed to ambient atmosphere before solidified film formation, then the filler can be supplied to the pattern forming surface, but oxidation of the pattern forming surface occurs leading to pattern collapse
Solution Approach 1:
The blocking member is positioned at the lower position before filler supply to establish a low oxygen atmosphere in advance. This preliminary action prevents oxidation before it can occur, allowing subsequent filler supply and solidified film formation to proceed without oxidation-related pattern collapse
Solution Approach 2:
The blocking member creates a confined space with reduced oxygen concentration between itself and the substrate. This inert-like atmosphere protects the pattern forming surface from oxidation during the critical period before solidified film formation, while still allowing filler supply to occur
2Reliability
If the blocking member is positioned at the lower position during filler supply, then oxidation is prevented, but filler supply and spreading becomes difficult
Solution Approach 1:
The blocking member is dynamically repositioned from the lower position to the upper position after filler supply begins. This dynamic adjustment maintains the low oxygen atmosphere during filler supply while then allowing adequate space for filler spreading and solidified film formation without oxidation interference
Solution Approach 2:
The blocking member is positioned at the lower position temporarily just long enough to establish the low oxygen atmosphere before filler supply. This preliminary positioning is sufficient to prevent oxidation during the critical supply phase, after which the blocking member is repositioned to allow filler spreading
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively suppresses oxidation and ensures smooth filler supply, preventing pattern collapse and defects by maintaining a low oxygen atmosphere during chemical processing and precise filler distribution.
Implementation Method 1
a blocking member having a disk portion that has a substrate facing surface facing the substrate from above and a circular cylindrical portion that extends downward from an outer peripheral portion of the disk portion be disposed at a lower position of blocking a space above the pattern forming surface from an atmosphere of an external space of the space
Implementation Method 2
a solidified film forming step of solidifying the filler supplied to the pattern forming surface to form a solidified film of the filler on the pattern forming surface
Implementation Method 3
a filler spreading step of rotating the substrate around a vertical rotational axis to spread the filler supplied to the pattern forming surface toward an outer periphery of the substrate
Data Source
AI summary
A substrate processing method includes an intermediate processing step of processing the pattern forming surface by the intermediate processing liquid after a chemical liquid processing step, a filler discharging step of discharging a filler after the intermediate processing step, a filler spreading step of spreading the filler, a solidified film forming step of solidifying the filler, a lower position disposing step of making a blocking member be disposed at a lower position prior to start of the chemical liquid processing step, and a blocking member elevating step of starting elevation of the blocking member toward an upper position in a state where the pattern forming surface is covered with the intermediate processing liquid. The chemical liquid is discharged from a central nozzle. Spreading of the filler is started in a state where the blocking member is positioned at the upper position.