Blocking Plate Mechanism for Substrate Processing Apparatus
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Solution Overview
Problem
Batch type substrate processing apparatuses face challenges in minimizing contamination and optimizing productivity due to the need for precise control of the stacking space volume during thermal processing of substrates, especially at high temperatures like 550° C. to 600° C. for crystallizing amorphous silicon into polysilicon.
Innovation Solution
The apparatus features a chamber design with a movable substrate holder and an elastic blocking member that minimizes the stacking space volume by sealing the process space from the stacking space, using a connection cylinder and blocking plate to isolate the chamber body, and incorporates a sealing member and cooling passage to maintain a clean and controlled environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a batch type substrate processing apparatus is used to process multiple substrates, then productivity is improved, but the stacking space volume increases leading to contamination risk
Solution Approach 1:
The blocking plate is designed to move dynamically between a first position (when substrate holder is at stacking position) and a second position (when substrate holder is at process position). This dynamic adjustment allows the stacking space volume to be minimized during processing while maintaining adequate space for substrate stacking, thus improving productivity without increasing contamination risk
Solution Approach 2:
The process space is extracted and separated from the stacking space using the blocking plate and connection cylinder mechanism. By isolating the process space where thermal processing occurs from the stacking space, contamination from the processing environment is prevented from affecting the substrates in the stacking area
2Manufacturing precision
If the stacking space volume is minimized to reduce contamination, then substrate quality is improved, but the apparatus structure becomes more complex
Solution Approach 1:
The blocking plate serves multiple functions: it blocks the process space from the stacking space to prevent contamination, it is connected to the connection cylinder for positional adjustment, and it works in conjunction with the sealing member to maintain space isolation. This multi-functionality reduces the need for separate components, thereby limiting the increase in apparatus complexity
Solution Approach 2:
The connection cylinder is disposed within the chamber body, and the blocking plate is connected to the connection cylinder, creating a nested arrangement. The sealing member is further nested between the blocking plate and the chamber body. This nested structure minimizes the overall apparatus complexity by integrating multiple components into a compact arrangement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces contamination and improves substrate quality and productivity by ensuring a minimized and controlled stacking space, preventing damage from contaminants and particles during the processing of multiple substrates.
Implementation Method 1
a blocking member (70) connected between the opened lower portion of the chamber body (30) and the connection cylinder (80) to isolate the opened lower portion of the chamber body from the outside. In some embodiments, the blocking member (70) may be elastic
Implementation Method 2
incorporates a sealing member and cooling passage to maintain a clean and controlled environment
Data Source
AI summary
Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having a passage, through which substrates are transferred, in one side thereof, the chamber body having opened upper and lower portions, an inner reaction tube disposed above the chamber body to provide a process space in which a process with respect to the substrates is performed, the inner reaction tube having an opened lower portion, a substrate holder disposed in the opened lower portion of the chamber to move between a stacking position at which the substrates transferred through the passage are vertically stacked and a process position at which the substrate holder ascends toward the process space to perform the process with respect to the stacked substrates, a blocking plate connected to a lower portion of the substrate holder to ascend or descend together with the substrate holder, the blocking plate closing the opened lower portion of the inner reaction tube at the process position, a connection cylinder vertically disposed on a lower portion of the blocking plate to ascend or descend together with the blocking plate, and a blocking member connected between the opened lower portion of the chamber body and the connection cylinder to isolate the opened lower portion of the chamber body from the outside.