Blowing Roller Gas Distribution for Thin Film Cooling
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Solution Overview
Problem
Conventional thin film-manufacturing methods face challenges in enhancing film-forming rates while maintaining high cooling efficiency, as increased cooling gas introduction leads to reduced vacuum levels, deteriorating film quality and increasing equipment costs.
Innovation Solution
A thin film-manufacturing apparatus with a blowing roller that includes a cylindrical shell with through holes for gas supply, an internal block to inhibit rotation, a manifold for gas introduction, and a clearance for efficient gas distribution, allowing high gas pressure between the shell and substrate without compromising vacuum levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a large amount of cooling gas is introduced to cool the substrate, then the cooling efficiency is improved, but the vacuum level is reduced, deteriorating film quality
Solution Approach 1:
The blowing roller is divided into multiple through-holes that distribute cooling gas locally across the substrate surface. This segmentation allows efficient cooling through multiple small gas streams rather than one large stream, maintaining better vacuum levels while achieving the required cooling effect.
Solution Approach 2:
Cooling gas is supplied locally at specific positions through the through-holes in the blowing roller, directly at the substrate surface where cooling is needed. This localized cooling approach improves efficiency while minimizing the total amount of gas required, thus preserving vacuum quality.
2Temperature
If a large amount of cooling gas is introduced to cool the substrate, then the cooling efficiency is improved, but the equipment cost increases
Solution Approach 1:
The cooling system uses multiple small through-holes instead of requiring a large gas supply system. This segmentation reduces the size and cost of gas supply equipment while achieving the same cooling effect through distributed local cooling.
Solution Approach 2:
The invention changes the parameters of gas supply by using multiple small openings instead of large openings, operating at relatively high gas pressure to maintain vacuum levels. This parameter change allows efficient cooling with reduced equipment size and cost.
3Temperature
If high gas pressure is used to maintain cooling efficiency, then the cooling performance is improved, but the vacuum level is reduced
Solution Approach 1:
High gas pressure is applied through multiple small through-holes rather than a single large opening. This segmentation allows the system to maintain high cooling efficiency through localized high-pressure gas jets while the total gas quantity remains low enough to preserve vacuum levels.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables efficient gas cooling of the substrate, maintaining high film-forming rates and improving productivity while minimizing equipment size and cost.
Implementation Method 1
a blowing roller having a function of conveying the substrate and a function of supplying a gas for cooling the substrate toward the substrate
Implementation Method 2
it is possible to cool the slurry by spraying a large amount of cooling gas onto the slurry so as to conduct heat away from the slurry directly
Implementation Method 3
a manifold that has a relatively large dimension in the radial direction of the first shell, and that is formed, as a space defined by the internal block inside the first shell so as to maintain the gas introduced from the outside of the vacuum chamber, to introduce the gas toward the plurality of first through holes within the range of a holding angle
Implementation Method 4
a clearance that has a relatively small dimension in the radial direction, and that is formed, as a space formed inside the first shell, to introduce the gas toward the plurality of first through holes outside the range of the holding angle
Implementation Method 5
in the case of vacuum evaporation, thermal radiation from an evaporation source and thermal energy of evaporated atoms are applied onto a substrate
Implementation Method 6
thermal radiation from an evaporation source and thermal energy of evaporated atoms are applied onto a substrate, thereby increasing the temperature of the substrate
Data Source
AI summary
A conveyance system 50A of a film-forming apparatus 20A includes a blowing roller 6 having a function of supplying a cooling gas toward a substrate 21. The blowing roller has the first shell 11 and the internal block 12. The first shell 11 has a plurality of first through holes 13 as a gas supply channel, and is rotatable in synchronization with the substrate 21. The internal block 12 is disposed inside the first shell 11. A manifold 14 is defined by the internal block 12 inside the first shell 11. The manifold 14 is formed so as to introduce the gas toward the plurality of first through holes 13 within the range of a holding angle. A clearance 15 facing the plurality of first through holes 13 outside the range of the holding angle is further formed inside the first shell 11. In the radial direction, the manifold 14 has a relatively large dimension, and the clearance 15 has a relatively small dimension.