Boat Transfer Under Reducing Gas to Prevent Film Oxidation
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Solution Overview
Problem
Existing boat transfer methods for substrates in processing chambers face challenges in suppressing oxidation of metal films on substrates during high-temperature transfers, leading to non-uniform film deposition and particle attachment due to thermal expansion differences.
Innovation Solution
The method involves supplying a reducing gas into the processing chamber before transferring the boat with the substrate, creating a reducing atmosphere that suppresses oxidation of the metal film during the transfer process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a boat transfer method is used to transfer substrates into a processing chamber, then substrate transfer efficiency is improved, but oxidation of metal films on substrates occurs during high-temperature transfer
Solution Approach 1:
The patent applies an inert atmosphere principle by introducing a reducing gas (such as nitrogen or hydrogen) into the processing chamber before transferring the boat. This creates a protective atmosphere that prevents oxidation of the metal film on the substrate during the high-temperature transfer process, while still allowing efficient boat transfer into the chamber.
2Manufacturing precision
If high-temperature transfer is used to improve film deposition uniformity, then thermal expansion differences cause particle attachment
Solution Approach 1:
The patent applies parameter changes by carefully controlling the temperature profile during boat transfer. The temperature is maintained at a level that promotes uniform film deposition while avoiding excessive thermal expansion that would cause particle attachment. This involves optimizing the transfer temperature and duration as key parameters.
3Object-affected harmful factors
If reducing gas is supplied into the processing chamber before boat transfer, then oxidation of metal film is suppressed, but gas flow management complexity increases
Solution Approach 1:
The patent applies preliminary action by supplying the reducing gas into the processing chamber before the boat is transferred. This ensures that the protective atmosphere is already in place when the substrate enters, preventing oxidation from the outset. The gas flow rate and timing are pre-determined to simplify control during the actual transfer process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents oxidation of the metal film, ensuring uniform film deposition and reducing particle attachment, thereby improving the quality and consistency of the film formed on the substrate.
Implementation Method 1
supplying a reducing gas into the processing chamber, and transferring the boat with the substrate into the processing chamber in a state in which the reducing gas is present within the processing chamber
Data Source
AI summary
With respect to a boat transfer method for transferring a boat holding a substrate into a processing chamber, the boat transfer method includes supplying a reducing gas into the processing chamber, and transferring the boat into the processing chamber in a state in which the reducing gas is present within the processing chamber.