Bonded Cold Plate Assembly for Chip Warpage and Heat Flux Control

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Solution Overview

Problem

Chip assemblies face challenges with heat distribution due to coefficient of thermal expansion (CTE) mismatches between components, leading to mechanical failures and warpage, especially in high-power devices like GPUs and ASICs, where traditional heat distribution devices made from single materials fail to effectively manage heat and stress.

Innovation Solution

The use of bonded cold plates with high thermally conductive materials like silver diamond and copper, combined with optimized manufacturing methods and structural modifications such as die thinning and protrusions, to enhance thermal conductivity and control bond line thickness, along with a stiffener to manage warpage and stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a one piece heat distribution device made from a single thermally conductive material is used, then the device structure is simple and manufacturing is easy, but CTE mismatch between the heat distribution device and other components causes stress and warpage during temperature cycling

Engineering Contradiction:
Improveheat distribution device manufacturingVSAvoidassembly stress and warpage
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The heat distribution device is divided into multiple segments or layers, each made from different materials with varying thermal and mechanical properties. This segmentation allows each layer to be optimized for specific functions (heat conduction, CTE matching, structural support) while reducing overall stress and warpage in the assembly.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The heat distribution device uses composite materials consisting of multiple layers with different compositions, such as combining high-thermal-conductivity materials with materials having CTE values matched to adjacent components. This composite structure enables simultaneous optimization of thermal performance and mechanical compatibility.

Inventive Principle:
Principle #40Composite materials

2Power

If high power chips like GPUs and ASICs are used to increase processing capability, then computing performance improves, but heat generation increases requiring more complex cooling solutions

Engineering Contradiction:
Improvecomputing performanceVSAvoidheat generation
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

The heat distribution device incorporates regions with different thermal properties tailored to specific locations. High-thermal-conductivity materials are positioned directly beneath heat-generating chips to efficiently conduct heat away, while other regions use materials optimized for heat spreading or CTE matching, creating a spatially varying thermal architecture.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The heat distribution device acts as an intermediary thermal management system between the high-power chips and the cooling infrastructure. It includes intermediate structures such as thermal interface materials, heat spreaders, and graduated thermal pathways that facilitate efficient heat transfer from the chip junctions to the external cooling system.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If multiple reflow processes are used to bond components, then assembly reliability improves, but substrate and chip warpage increase due to repeated thermal cycling

Engineering Contradiction:
Improvecomponent bondingVSAvoidsubstrate and chip warpage
Core Design Contradiction:
ReliabilityVSShape

Solution Approach 1:

The patent modifies process parameters such as reflow temperature profiles, bonding sequence, and cooling rates to minimize cumulative thermal stress. By carefully controlling these parameters, the assembly achieves reliable bonding while reducing warpage accumulation across multiple reflow cycles.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The heat distribution device incorporates pre-designed stress-compensating structures and compliant layers that anticipate and cushion against thermal expansion differences during reflow processes. These built-in compensation mechanisms reduce warpage before it becomes a critical issue during subsequent bonding operations.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves thermal management by increasing heat flux and reducing warpage, allowing for efficient cooling of high-density electronics while minimizing material costs and manufacturing complexity.

Implementation Method 1

bonded cold plates with high thermally conductive materials like silver diamond and copper

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

coefficient of thermal expansion (CTE) mismatches between components, leading to mechanical failures and warpage

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentEP3926669B1Methods and heat distribution devices for thermal management of chip assemblies
Publication Date: 2024.11.13 GOOGLE LLC
  • EP3926669B1 patent drawingFigure 1
  • EP3926669B1 patent drawingFigure 2
  • EP3926669B1 patent drawingFigure 3A

AI summary

A method of manufacturing a chip assembly comprises joining an in-process unit to a printed circuit board; reflowing a bonding material disposed between and electrically connecting the in-process unit with the printed circuit board, the bonding material having a first reflow temperature; and then joining a heat distribution device to the plurality of semiconductor chips using a thermal interface material ("TIM") having a second reflow temperature that is lower than the first reflow temperature. The in-process unit further comprises a substrate having an active surface, a passive surface, and contacts exposed at the active surface; an interposer electrically connected to the substrate; a plurality of semiconductor chips overlying the substrate and electrically connected to the substrate through the interposer, and a stiffener overlying the substrate and having an aperture extending therethrough, the plurality of semiconductor chips being positioned within the aperture.