Diffusion-Bonded Fluid Mounting Panel for Leak-Free Temperature Control

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Solution Overview

Problem

Current process fluid panels are complex, space-consuming, and costly due to their design with discrete lines and multiple components, making them difficult to troubleshoot and requiring additional equipment for temperature and pressure control to prevent leaks and condensation.

Innovation Solution

A diffusion-bonded mounting panel with integrated metallic plates forming a reservoir and channels, incorporating vias and orifices for fluid flow and component attachment, along with a temperature-controlled plate for maintaining fluid temperature, reduces complexity and space requirements by integrating control components and eliminating the need for external reservoirs and mass flow controllers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If discrete lines and multiple components are used in process fluid panels, then fluid delivery functionality is achieved, but device complexity and space requirements increase significantly

Engineering Contradiction:
Improvefluid delivery system complexityVSAvoidpanel structure weight
Core Design Contradiction:
Device complexityVSWeight of moving object

Solution Approach 1:

The patent combines multiple discrete components (reservoir, mass flow controller, valves, sensors, temperature control) into a single integrated mounting panel. The panel includes integrated fluid reservoirs, flow control components, temperature control elements, and sensing devices all mounted in one unified structure, eliminating the need for separate external components and reducing overall system complexity and weight.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The mounting panel serves multiple functions simultaneously: it acts as a structural support, fluid reservoir container, flow control mechanism, temperature regulation device, and sensor mounting platform. This multi-functionality reduces the number of separate components needed and simplifies the overall fluid delivery system.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If multiple couplers, brackets, and elbows are used to route fluid lines, then fluid delivery paths are created, but the risk of leaks increases

Engineering Contradiction:
Improvefluid delivery reliabilityVSAvoidfluid line routing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent integrates fluid line routing directly into the panel structure through embedded channels and passages, eliminating the need for separate couplers, brackets, and elbows. The fluid pathways are formed as integral parts of the panel, reducing the number of connection points and potential leak sources.

Inventive Principle:
Principle #5Merging (Combining)

3Temperature

If external temperature control units are added to maintain fluid temperature, then condensation and particle build up are prevented, but space requirements and costs increase

Engineering Contradiction:
Improvefluid temperature controlVSAvoidpanel structure area
Core Design Contradiction:
TemperatureVSArea of stationary object

Solution Approach 1:

The patent integrates temperature control elements directly into the mounting panel structure. Heating elements and thermal management components are embedded within the panel itself, allowing temperature maintenance without requiring separate external temperature control units, thus saving space and reducing overall system size.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The temperature control components are nested within the panel structure, with heating elements and thermal management features incorporated into the internal geometry of the panel. This nesting approach allows temperature control functionality to be contained within the existing panel footprint without requiring additional external space.

Inventive Principle:
Principle #7Nested doll (Nesting)

4Ease of manufacture

If discrete components are used throughout the system, then fluid control functionality is achieved, but manufacturing costs increase

Engineering Contradiction:
Improvepanel manufacturing costVSAvoidsystem component quantity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent consolidates multiple discrete components into a single integrated panel structure that can be manufactured as one unit or pre-assembled module. This integration reduces the total number of parts that need to be sourced, inventoried, and assembled, thereby lowering manufacturing costs and simplifying production.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution simplifies fluid delivery systems by integrating control components and temperature management within the panel, reducing costs and space usage while maintaining fluid at consistent temperature and pressure, thus preventing leaks and condensation.

Implementation Method 1

A diffusion-bonded mounting panel with integrated metallic plates forming a reservoir and channels

Methodology Applied
Scientific EffectDiffusion bonding: Diffusion Welding

Data Source

PatentUS11624450B2Fluid delivery mounting panel and system
Publication Date: 2023.04.11 APPLIED MATERIALS INC
  • US11624450B2 patent drawing
  • US11624450B2 patent drawing
  • US11624450B2 patent drawing

AI summary

An apparatus comprises a mounting panel including a top plate having multiple vias and multiple orifices. An internal face of the top plate includes a first cut-out region and channels through which to flow a process fluid. The first cut-out region can be a reservoir in which to contain the process fluid. The multiple vias are adapted for passing the process fluid through the top plate. The multiple orifices are adapted for attaching a plurality of process fluid control components to the mounting panel. An inner plate also has multiple additional vias. The apparatus includes a bottom plate, where the inner plate is compacted between the top plate and the bottom plate to form an integral metallic body in which to contain and flow the process fluid.