Rotating Bonded Substrate Separation with Dynamic Nozzle Aiming
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Solution Overview
Problem
Existing substrate separation techniques face challenges in supplying fluid to the outer periphery of bonded substrates with good positional accuracy, leading to difficulties in reliable separation.
Innovation Solution
A substrate separation apparatus and method that includes a holding part to rotate a bonded substrate, a nozzle to inject fluid along tangent and center directions, and a nozzle drive part to change fluid injection directions, ensuring precise fluid application and reliable separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the distance between the nozzle and the outer periphery of the bonded substrate is large, then the substrate separation can be performed, but the positional accuracy of fluid supply deteriorates
Solution Approach 1:
The nozzle is made movable relative to the bonded substrate, allowing the distance and injection direction to be dynamically adjusted. The nozzle can move in the radial direction of the substrate and change injection angles, enabling the system to adapt to different separation stages and maintain optimal positional accuracy throughout the process
Solution Approach 2:
The system changes multiple parameters simultaneously: the distance between nozzle and substrate, the injection direction angle, and the nozzle position in radial direction. These parameter changes allow the system to overcome the contradiction by adjusting conditions to achieve both adequate separation distance and high positional accuracy
2Device complexity
If the fluid is supplied from a fixed direction, then the injection system is simple, but the fluid cannot be supplied to different positions accurately during substrate rotation
Solution Approach 1:
The injection system is made dynamic with the nozzle capable of moving in multiple directions and changing injection angles. This allows the nozzle to track the separation front as the substrate rotates, maintaining accurate fluid supply to the separation position without requiring an overly complex multi-nozzle system
Solution Approach 2:
A single nozzle is designed to perform multiple functions by changing its position and injection direction. The same nozzle can supply fluid to different positions on the rotating substrate by adjusting its radial position and injection angle, eliminating the need for multiple fixed nozzles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables fluid to be supplied to the bonded substrate with high positional accuracy, reducing damage and ensuring complete separation without fluid waste.
Implementation Method 1
high-pressure water (water jet) is supplied from a nozzle toward the outer periphery of the bonded substrate while rotating the bonded substrate, thereby separating the bonded substrate through the use of the wedge effect of a fluid
Data Source
AI summary
A substrate separation apparatus includes: a holding part configured to hold and rotate a bonded substrate formed by bonding a pair of substrates together; a nozzle configured to separate the bonded substrate by injecting a fluid toward an outer periphery of the bonded substrate under rotation; and a nozzle drive part configured to change a direction of injection of the fluid from the nozzle between a first direction which is a direction extending along a tangent to the outer periphery of the bonded substrate and a second direction which is a direction facing a center of the bonded substrate.