Bonding Pad Segmentation for Flexible Probing

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Solution Overview

Problem

Existing semiconductor devices with bonding pads have inefficiencies in space utilization and flexibility, as the bonding and probing regions are often larger than needed, leading to unnecessary margins and restricted design flexibility after formation.

Innovation Solution

The semiconductor device incorporates a bonding pad design with a first region, a second region, and a third region, where the first and second regions can serve as either the bonding or probing regions, with area indication marks (notches) to enable flexible selection and symmetrical arrangement, allowing for efficient use of space and reliable connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the bonding and probing regions are made adequately large to include all necessary areas, then the connection reliability is ensured, but the bonding pad area increases and space utilization becomes inefficient

Engineering Contradiction:
Improveconnection reliabilityVSAvoidbonding pad area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The bonding pad is divided into multiple distinct regions: a bonding region for wire bonding, a probing region for electrical testing, and a third region that can serve as either bonding or probing area. This segmentation allows each region to be optimized for its specific function, eliminating the need for excessive margins and improving space utilization while maintaining reliable connections in each designated area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces flexibility in region assignment by allowing the third region to dynamically serve as either a bonding region or a probing region depending on specific design requirements. This dynamic capability enables optimization of the bonding pad layout for different applications without increasing the overall pad area, thus maintaining reliability while improving space efficiency.

Inventive Principle:
Principle #15Dynamics

2Ease of manufacture

If the bonding region is fixed to a predetermined region on the bonding pad, then the manufacturing process is simplified, but the design flexibility after formation is restricted

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoiddesign flexibility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent implements a dynamic region assignment system where the third region can be designated as either a bonding region or a probing region based on post-manufacturing design requirements. This maintains manufacturing simplicity through clear regional demarcation while providing flexibility in how the regions are ultimately utilized, allowing design changes without requiring manufacturing process changes.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The third region is designed to serve multiple functions - it can act as either a bonding region or a probing region depending on the specific application needs. This multi-functionality provides design flexibility after formation while maintaining the simplicity of the manufacturing process, as the region's dual capability is built into the design rather than requiring complex manufacturing adjustments.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If margins are increased to accommodate both bonding and probing operations, then the reliability of operations is improved, but the space utilization and integration degree are reduced

Engineering Contradiction:
Improveoperation reliabilityVSAvoidintegration degree
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

By segmenting the bonding pad into distinct bonding and probing regions with clear boundaries, the patent eliminates the need for excessive margins between operations. Each region is sized appropriately for its specific function, and the segmentation prevents operational interference, thereby maintaining high reliability while improving space utilization and integration degree.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies partial action by providing adequate space only where necessary for each specific operation rather than adding excessive margins throughout. The bonding region, probing region, and third region are sized precisely for their intended functions, avoiding unnecessary space allocation while ensuring reliable operation in each area.

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentUS8508055B2Semiconductor device and manufacturing method thereof
Publication Date: 2013.08.13 RENESAS ELECTRONICS CORP
  • US8508055B2 patent drawing
  • US8508055B2 patent drawing
  • US8508055B2 patent drawing

AI summary

A semiconductor device includes a bonding pad, and an area designation marking, wherein the bonding pad includes a first region, a second region, and a third region placed between the first region and the second region, wherein the area designation marking includes a first area designation mark configured to designate a first boundary between the first region and the third region and a second area designation mark configured to designate a second boundary between the second region and the third region, wherein the first region and the second region are configured to be contacted with a test probe. The first area designation mark includes a first notch or a first protrusion. The second area designation mark includes a second notch or a second protrusion. The first area designation mark includes a first pair of notches that is linearly spaced apart from each other to designate the first boundary line.