Thermocompression Bonding Sheet Fixation for Annular Frame Processing

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The existing method of using a resin sheet without a bonding layer for thermocompression bonding of workpieces and annular frames faces challenges in achieving a secure fixation, leading to instability during processing.

Innovation Solution

A processing method involving heating and compression bonding a thermocompression bonding sheet to both the workpiece and annular frame using a heat table and heat roller, ensuring firm integration without a bonding layer, allowing for secure fixation and processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If a resin sheet without a bonding layer is used for thermocompression bonding, then residue issues are prevented, but fixation strength to the annular frame deteriorates

Engineering Contradiction:
ImproveresidueVSAvoidfixation strength
Core Design Contradiction:
Object-generated harmful factorsVSStrength

Solution Approach 1:

The bonding sheet is designed with non-uniform thickness, featuring a thicker first region and a thinner second region. This local quality variation allows the thicker first region to provide sufficient fixation strength to the annular frame, while the thinner second region prevents residue formation on the workpiece surface, thus resolving the contradiction between fixation strength and residue prevention.

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If an adhesive tape with a bonding layer is used, then irregularities are absorbed, but device operation fails due to residues

Engineering Contradiction:
Improveirregularity absorptionVSAvoidresidue
Core Design Contradiction:
Stability of the object's compositionVSObject-generated harmful factors

Solution Approach 1:

The bonding sheet incorporates a thicker first region that can absorb irregularities on the workpiece surface, while the thinner second region ensures no residue remains after processing. This local quality differentiation resolves the contradiction between irregularity absorption and residue prevention.

Inventive Principle:
Principle #3Local quality

3Object-generated harmful factors

If the bonding sheet is made uniformly thin, then residue is prevented, but fixation to the annular frame becomes insufficient

Engineering Contradiction:
ImproveresidueVSAvoidfixation reliability
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The bonding sheet features a non-uniform thickness distribution with a thicker first region for reliable fixation to the annular frame and a thinner second region for residue-free processing. This local quality variation resolves the contradiction between fixation reliability and residue prevention.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method effectively secures the thermocompression bonding sheet to both the workpiece and annular frame, enabling stable processing and preventing residue issues, thus enhancing the processing efficiency.

Implementation Method 1

the thermocompression bonding sheet is pressed against the annular frame that has been heated by a heat table with a heat source included therein, by a heat roller with a heat source included therein while being heated by the heat roller

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

the thermocompression bonding sheet is pressed against the annular frame that has been heated by a heat table with a heat source included therein, by a heat roller with a heat source included therein while being heated by the heat roller

Methodology Applied
Scientific EffectCompression: Compression

Data Source

PatentUS11865634B2Processing method of workpiece
Publication Date: 2024.01.09 DISCO CORP
  • US11865634B2 patent drawing
  • US11865634B2 patent drawing
  • US11865634B2 patent drawing

AI summary

A processing method of a workpiece includes an integration step of heating and compression bonding a thermocompression bonding sheet to an annular frame that has an opening to receive the workpiece therein and to the workpiece received in the opening, whereby the annular frame and the workpiece are integrated via the thermocompression bonding sheet, and a processing step of processing the workpiece integrated with the annular frame via the thermocompression bonding sheet. In the integration step, the thermocompression bonding sheet is pressed against the annular frame that has been heated by a heat table with a heat source included therein, by a heat roller with a heat source included therein while being heated by the heat roller, whereby the thermocompression bonding sheet is fixed to the annular frame.