Bonding Pressure Chamber With Thin Film for Inclined Stages
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Solution Overview
Problem
Existing bonding devices struggle to apply uniform pressure to bonding targets, especially when the stage is inclined, which can lead to inconsistent bonding results.
Innovation Solution
A bonding device with a stage, a lower transmission member, an upper transmission member, a chamber, and a thin film that expands to apply pressure uniformly to the bonding target, even if the stage is inclined.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a stage is inclined to accommodate bonding targets, then the bonding device can handle various bonding scenarios, but the pressure application becomes non-uniform across the bonding target
Solution Approach 1:
The patent employs a flexible thin film as the lower transmission member that can conform to inclined surfaces. This thin film is stretched across the chamber and can adapt to the inclination angle of the stage while maintaining uniform pressure distribution across the bonding target through its flexibility and elastic properties.
Solution Approach 2:
The patent changes the physical state of the transmission medium from rigid to flexible by using a thin film that can deform. This parameter change allows the system to maintain uniform pressure application even when the stage inclination varies, as the thin film can adjust its shape to match the inclined surface.
2Strength
If a rigid transmission member is used to apply pressure, then the structure is simple and strong, but the pressure distribution becomes non-uniform when the stage is inclined
Solution Approach 1:
The patent replaces the rigid transmission member with a flexible thin film that maintains sufficient strength while enabling uniform pressure distribution. The thin film's flexibility allows it to conform to the inclined stage surface, ensuring even pressure application across the bonding target.
Solution Approach 2:
The patent uses composite construction for the pressure application system, combining the chamber structure with a flexible thin film transmission member. This composite approach integrates the structural support function with the pressure distribution function, achieving both strength and uniformity.
3Stability of the object's composition
If the lower transmission member is fixed to the vertical movement member, then the pressure application is stable, but the transmission member cannot adapt to stage inclination
Solution Approach 1:
The patent introduces dynamic adaptability by making the lower transmission member a flexible thin film that can change its configuration in response to stage inclination. While the chamber structure remains stable, the thin film dynamically adjusts to the inclined surface, maintaining both stability and adaptability.
Solution Approach 2:
The flexible thin film acts as an intermediary between the stable chamber structure and the inclined stage. It mediates the interaction by providing a stable pressure source from the chamber while adapting to the variable inclination of the stage, thus reconciling stability with adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device ensures reliable and uniform pressure application to the bonding target, improving the consistency and quality of the bonding process, regardless of the stage's inclination.
Implementation Method 1
a thin film between the chamber and the lower transmission member, defining the internal space together with the chamber, and configured to be deformed according to expansion of the internal space as the air is introduced
Data Source
AI summary
A bonding device includes a stage supporting a bonding target, a lower transmission member adjacent to the stage in a first direction, an upper transmission member spaced apart from the lower transmission member in the first direction, a chamber between the lower transmission member and the upper transmission member, and partially defining an internal space for accommodating air, a thin film between the chamber and the lower transmission member, defining the internal space together with the chamber, and configured to be deformed according to expansion of the internal space as the air is introduced, and a vertical movement member configured to move the lower transmission member in the first direction, and separable from the lower transmission member.


