Borazine Stabilization via Ionic Liquid Solvent
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Solution Overview
Problem
Precursors used in the semiconductor industry, such as borazine, suffer from poor shelf life due to self-condensation and polymerization when kept in pure form, leading to instability and reduced material properties.
Innovation Solution
A composition comprising a solvent and a precursor, where the solvent is an ionic liquid with low vapor pressure, stabilizes borazine by reducing intermolecular interactions, thereby inhibiting polymerization and extending its shelf life. The solvent is used in a precursor vessel at controlled temperatures to maintain the stability of borazine derivatives.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If borazine is kept in pure form, then material properties are excellent, but shelf life is poor due to self-condensation and polymerization
Solution Approach 1:
An inert solvent is introduced as an intermediary substance to dissolve borazine, preventing direct intermolecular interactions between borazine molecules that lead to polymerization. The solvent acts as a physical barrier while maintaining borazine's chemical integrity, thus extending shelf life without compromising material properties.
Solution Approach 2:
The patent employs an inert solvent environment to stabilize borazine by eliminating reactive interactions. The inert atmosphere created by the solvent prevents oxidation and other unwanted chemical reactions, allowing borazine to maintain its excellent material properties over extended storage periods.
2Duration of action of stationary object
If solvent is used to stabilize borazine, then shelf life is extended, but solvent contamination may occur in the gas stream
Solution Approach 1:
The patent exploits the phase transition difference between the inert solvent (liquid) and borazine (volatile). By controlling temperature and pressure, borazine can be selectively vaporized from the liquid solvent, leaving the non-volatile solvent behind. This phase transition mechanism ensures high purity gas stream without solvent contamination.
Solution Approach 2:
The solvent and borazine are separated in different spatial zones: the solvent remains in the liquid phase in the storage reservoir, while borazine vapor occupies the gas phase in the delivery system. This spatial separation of phases ensures that the gas stream contains only borazine without solvent contamination, maintaining manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The described composition significantly increases the shelf life of borazine by inhibiting polymerization, allowing for the generation of a substantially pure borazine gas stream for forming layers on substrates without solvent contamination, thus enhancing material properties and process efficiency.
Implementation Method 1
A composition comprising a solvent and a precursor, where the solvent is an ionic liquid with low vapor pressure, stabilizes borazine by reducing intermolecular interactions, thereby inhibiting polymerization and extending its shelf life
Data Source
AI summary
Compositions, related methods, and related systems are disclosed. The compositions can comprise a precursor and a liquid solvent. The precursor can be unstable in substantially pure form in an inert atmosphere at a temperature of at least 10° C. to at most 100° C. The solvent can have a vapor pressure of at most 1.0 mPa at a temperature of 20° C.