Two-Part Bore Hole Plug for Leak-Safe Substrate Carriers
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Solution Overview
Problem
Existing substrate carriers for CVD and ALD processes face issues with gas channel plugs becoming loose, leading to gas leakage and damage to the system, affecting process parameters.
Innovation Solution
A bore hole plug design comprising two parts, where the first part is press-fitted for a gas-tight seal and the second part includes interlocking means, such as a threaded section, to securely lock the plug in place, preventing it from falling out or becoming loose.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a single press-fitted bore hole plug is used to close gas channels, then the manufacturing process is simple, but the plug becomes loose over time causing gas leakage
Solution Approach 1:
The bore hole plug is divided into two separate parts: a first part that is press-fitted into the bore hole to provide gas-tight closure, and a second part that is threaded and screwed into the first part to provide mechanical retention. This segmentation allows each part to perform its specific function optimally while working together as a unified plug system.
Solution Approach 2:
The invention combines two different fastening mechanisms (press-fit and threaded connection) into a single integrated plug system. The first part provides the gas seal through press-fitting, while the second part provides mechanical retention through threading, merging these functions into one complete solution that addresses both sealing and retention requirements.
2Object-affected harmful factors
If the bore hole plug is pressed in deep to ensure gas-tight seal, then gas leakage is prevented, but the plug may fall out or become loose
Solution Approach 1:
By separating the plug into two parts with different functions, the system can achieve deep press-fitting for gas sealing without the entire plug becoming loose. The first part can be pressed deep into the bore hole for sealing, while the second part extends outward to provide threaded retention, preventing the plug from falling out.
Solution Approach 2:
The threaded second part acts as an intermediary mechanical retention mechanism that prevents the press-fitted first part from becoming loose. The threading provides additional mechanical interlocking that compensates for any potential loosening of the press-fit connection over time.
3Reliability
If a threaded connection is added to the plug, then plug retention is improved, but the device complexity increases
Solution Approach 1:
The segmentation of the plug into two parts actually simplifies the design by assigning specific functions to each part. The first part handles only the gas sealing function through press-fitting, while the second part handles only the mechanical retention function through threading, making each component simpler and more specialized.
Solution Approach 2:
The second part of the plug serves multiple functions: it provides mechanical retention through threading, acts as a locking mechanism for the first part, and can serve as an access point for maintenance or replacement. This multi-functionality justifies the additional complexity by providing multiple benefits from a single structural addition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures a reliable gas-tight closure of the bore holes, preventing leakage and system damage, while maintaining the existing machining processes and not altering the CVD, ALD, or MOCVD process parameters.
Implementation Method 1
at least a section of said first part has a shape mating said bore hole for press fitting at least said section of said first part in said bore hole
Implementation Method 2
said second part is provided with interlocking means, and each bore hole is provided with a means corresponding to and arranged for receiving and mechanically retaining said interlocking means of said second part
Data Source
AI summary
The present invention relates generally to a substrate or wafer carrier for use in a system for depositing thin films. A substrate carrier for use in a system for growing epitaxial layers on semiconductor substrates is provided, said substrate carrier being a disk having a first surface side, comprising a plurality areas defined as substrate support areas arranged for accommodating, during use, said semiconductor substrates, and wherein said substrate carrier further comprises a plurality of gas channels, and wherein each of said gas channels consists of a bore hole arranged from a wall surface circumferential of the substrate carrier and provided with a bore hole plug. The bore hole plug comprises a first and a separate second part, wherein at least a section of said first part has a shape mating said bore hole for press fitting at least said section of said first part in said bore hole, and wherein said second part is provided with interlocking means. The interlocking means of said bore hole is provided in said wall surface of said substrate carrier at an angle with respect to the longitudinal direction of said bore hole, for blocking said first bore hole plug part.