Boron X-Ray Window Structure for Low Gas Permeability

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Solution Overview

Problem

X-ray windows face challenges in achieving a balance of low gas permeability, low outgassing, high strength, low visible and infrared light transmission, high x-ray flux, corrosion resistance, high reliability, and low cost, while also needing to withstand differential pressures and corrosive environments, which existing technologies have not adequately addressed.

Innovation Solution

The development of x-ray windows featuring a boron-film on a support-frame with a hermetic seal, optionally combined with an annular-film and a thin aluminum-film, manufactured using a method involving boron deposition and etching, which enhances strength, corrosion resistance, and reduces gas permeability, while maintaining high x-ray transmissivity and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a boron-film on support-frame structure is used, then gas permeability is reduced and corrosion resistance is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvegas permeabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The x-ray window is divided into multiple functional layers: a boron film layer for gas permeability control, a support frame for structural integrity, and optionally an annular film for edge support. This segmentation allows each layer to be optimized independently for its specific function while managing manufacturing complexity through modular construction

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses composite material structures combining boron film with support frame materials, creating a multi-material system that achieves low gas permeability and high corrosion resistance. The composite structure leverages the complementary properties of different materials to resolve the contradiction between reliability and manufacturing complexity

Inventive Principle:
Principle #40Composite materials

2Strength

If multiple film layers (boron-film, annular-film, thin aluminum-film) are combined, then strength and corrosion resistance are improved, but device complexity increases

Engineering Contradiction:
Improvestructural strengthVSAvoiddevice complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

Multiple film layers (boron-film, annular-film, thin aluminum-film) are merged into a single integrated structure where each layer contributes specific properties. The boron film provides gas permeability control, the annular film provides edge support, and the aluminum film enhances strength and corrosion resistance, creating a unified multi-functional component that reduces overall device complexity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention employs composite material layers with distinct functions: boron for gas permeability control, aluminum for strength enhancement, and annular structures for mechanical support. This composite approach allows simultaneous achievement of high strength and corrosion resistance while managing complexity through functional material selection

Inventive Principle:
Principle #40Composite materials

3Reliability

If hermetic seal is implemented, then reliability is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvehermetic seal reliabilityVSAvoidsealing precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The invention uses thin film structures (boron film, annular film) that can conform to surface irregularities and provide hermetic sealing. These flexible thin films accommodate manufacturing tolerances better than rigid sealing methods, achieving reliable hermetic seals without requiring extremely high manufacturing precision

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The hermetic seal is achieved through composite material construction combining boron film with support frame structures. This composite sealing approach distributes sealing stresses and accommodates thermal expansion differences, maintaining seal reliability while reducing precision requirements compared to single-material sealing methods

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed x-ray window design achieves low gas permeability, high strength, and corrosion resistance, ensuring reliable performance in demanding environments while maintaining low cost and high x-ray flux, suitable for applications requiring precise detection and analysis.

Implementation Method 1

low visible and infrared light transmission, high x-ray flux

Methodology Applied
Scientific EffectElectromagnetic radiation absorption: Absorption (EM radiation)

Implementation Method 2

low gas permeability

Methodology Applied
Scientific EffectGas permeability barrier: Permeation

Data Source

PatentUS11967439B2Boron x-ray window
Publication Date: 2024.04.23 MOXTEK INC
  • US11967439B2 patent drawing
  • US11967439B2 patent drawing
  • US11967439B2 patent drawing

AI summary

An x-ray window can include a boron-film 12 and an aluminum-film 52 spanning an aperture 15 of a support-frame 11. The boron-film 12 and the aluminum-film 52 can be the only films, or the primary films, spanning the aperture. The boron-film 12 can include boron and hydrogen. An annular-film 32 can adjoin the support-frame 11, on an opposite side of the support-frame 11 from the boron-film 12. The annular-film 32 can include boron and hydrogen. The annular-film 32 can have the same material composition as, and can be similar in thickness with, the boron-film 12.