Bottom Gas Purge Nozzle Pressure Sensor Alignment
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Solution Overview
Problem
Existing bottom gas purge devices in semiconductor factories face inefficiencies due to inadequate connection between the nozzle and purge port, leading to gas leakage and potential container inclination, which reduces oxygen concentration and complicates substrate handling.
Innovation Solution
A bottom gas purge device equipped with a pressure sensor at the nozzle tip to detect appropriate connection pressure, preventing gas leakage and container inclination by ensuring proper alignment and pressure during gas purging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pressure at which the nozzle is pressed against the purge port is increased to ensure connection, then connection reliability is improved, but the container is pushed upward causing inclination
Solution Approach 1:
The pressure sensor provides real-time feedback on the connection pressure between the nozzle and purge port. When the pressure exceeds a predetermined threshold indicating potential container inclination, the system automatically adjusts or stops the pressing force, thereby maintaining reliable connection without causing container instability.
2Reliability
If pressure is increased to ensure nozzle connection, then gas leakage is prevented, but the entire container is pushed upward
Solution Approach 1:
The pressure sensor monitors the pressing force in real-time and provides feedback to the control system. When the pressure reaches a level that could push the container upward, the system automatically reduces or stops the pressing force, preventing both gas leakage and container inclination simultaneously.
3Reliability
If connection pressure is increased to prevent gas leakage, then sealing is improved, but oxygen concentration around the device is excessively reduced
Solution Approach 1:
The pressure sensor ensures that the nozzle presses against the purge port with precisely the right amount of force needed to seal the connection. This prevents gas leakage without excessive pressing that would cause cleaning gas to escape and reduce oxygen concentration around the device.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device reliably connects the nozzle to the purge port at optimal pressure, preventing gas leakage and container inclination, thereby enhancing the efficiency and safety of the gas purging process while maintaining a stable environment for substrate handling.
Implementation Method 1
a pressure sensor provided at a tip end portion of the nozzle and configured to detect a pressure rising between the purge port and the nozzle when the nozzle is connected to the purge port
Data Source
AI summary
Provided is a bottom gas purge device including a nozzle that can be appropriately connected to a purge port. A bottom gas purge device configured to introduce a cleaning gas into a container from a bottom portion of the container accommodating a substrate includes: a mounting table on which the container is mounted; a nozzle provided so as to be movable relative to the mounting table in an upward-downward direction and connectable from below to a purge port provided in the bottom portion of the container; a gas supply unit configured to supply the cleaning gas to the nozzle; and a pressure sensor provided at a tip end portion of the nozzle and configured to detect a pressure rising between the purge port and the nozzle when the nozzle is connected to the purge port.