Branch Electrode Terminal Structure for Better Semiconductor Bonding

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Insufficient heat conduction between a metal pattern and an electrode terminal during bonding in semiconductor devices leads to poor bonding due to inadequate temperature rise, resulting in unfavorable bonding quality.

Innovation Solution

The semiconductor device design includes a metal pattern and an electrode terminal with branching portions, where the narrow branch portion is bonded with thinner bonding material closer to the metal pattern, ensuring effective heat conduction and reducing temperature differences between the electrode terminal and the metal pattern.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a gap is formed between the metal pattern and the electrode terminal during bonding, then the bonding process becomes easier to perform, but heat conduction between the metal pattern and the electrode terminal becomes insufficient, resulting in poor bonding quality

Engineering Contradiction:
Improvebonding processVSAvoidbonding quality
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The electrode terminal is designed with varying width along its length, creating different local geometries. The wider portion ensures sufficient heat conduction when bonded to the metal pattern, while the narrower portion maintains ease of bonding. This local variation in geometry allows the same component to satisfy both contradictory requirements at different locations.

Inventive Principle:
Principle #3Local quality

2Reliability

If the bonding material thickness is increased to improve bonding quality, then bonding reliability improves, but heat conduction between the metal pattern and electrode terminal deteriorates due to insufficient temperature rise

Engineering Contradiction:
Improvebonding qualityVSAvoidtemperature rise
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The bonding material thickness is varied locally according to the width of the electrode terminal. At the wider portion where heat conduction is critical, the bonding material is made thinner to maintain thermal contact and temperature rise. At other portions where bonding reliability is prioritized, the bonding material can be thicker. This local differentiation resolves the contradiction between bonding quality and temperature rise.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances heat conduction and reduces the likelihood of insufficient temperature rise, thereby improving bonding quality and suppressing poor bonding between the metal pattern and the electrode terminal.

Implementation Method 1

a gap formed between the metal pattern and the electrode terminal can cause insufficient heat conduction between the metal pattern and the electrode terminal

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentUS11901326B2Semiconductor device with branch electrode terminal and method of manufacturing semiconductor device
Publication Date: 2024.02.13 MITSUBISHI ELECTRIC CORP
  • US11901326B2 patent drawing
  • US11901326B2 patent drawing
  • US11901326B2 patent drawing

AI summary

An object is to provide a semiconductor device which suppresses poor bonding between a metal pattern and an electrode terminal due to insufficient temperature rise at the time of bonding the metal pattern and the electrode terminal. The electrode terminal is branched into a plurality of branch portions in a width direction on one end side of an extending direction thereof, of the plurality of branch portions, a first branch portion and a second branch portion are bonded on the metal pattern via a bonding material, respectively, the first branch portion has a wider width than that of the second branch portion, and the bonding material between the second branch portion and the metal pattern is thinner than the bonding material between the first branch portion and the metal pattern.