Branch Pipe Gas Consumption for Stable Diaphragm Vacuum Gauges
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Solution Overview
Problem
Diaphragm vacuum gauges in vacuum chambers face contamination issues due to film formation gases, leading to shifts in pressure measurement zero points, which existing technologies fail to adequately address.
Innovation Solution
A processing apparatus with a branch pipe having an inner surface that promotes consumption of film formation gases, reducing gas deposition on the diaphragm vacuum gauge, and optionally using a bypass for cleaning gas to extend the replacement cycle of the branch pipe.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a diaphragm vacuum gauge is used to measure pressure in a vacuum chamber, then pressure measurement is enabled, but film formation gas deposits on the diaphragm causing zero point shifts
Solution Approach 1:
A branch pipe with a material that promotes film formation gas consumption is introduced as an intermediary component between the vacuum chamber and the diaphragm vacuum gauge. This material acts as a mediator that consumes the film formation gas through chemical reaction or adsorption, preventing it from reaching and depositing on the diaphragm surface, thereby protecting the measurement accuracy while maintaining continuous pressure monitoring capability
2Object-affected harmful factors
If a baffle is provided to suppress contamination of the diaphragm, then protection from gases and particles is improved, but film formation gas still reaches the diaphragm causing zero point shifts
Solution Approach 1:
The invention converts the harmful film formation gas into a beneficial consumed product by introducing a material that actively consumes the gas through chemical reaction or adsorption. The branch pipe containing this material transforms the harmful deposition process into a controlled consumption process, where the film formation gas is converted into harmless substances before reaching the diaphragm, thereby stabilizing the zero point while maintaining the protective function
3Object-affected harmful factors
If the exhaust pipe and branch pipe have inner surfaces that promote consumption of film formation gas, then film deposition on the diaphragm is suppressed, but the system complexity increases
Solution Approach 1:
The invention applies the film formation gas consumption function locally rather than throughout the entire system. The material that promotes gas consumption is selectively placed in the branch pipe and exhaust pipe inner surfaces, creating localized consumption zones. This local quality approach suppresses film deposition at critical areas while maintaining simplicity in other parts of the system, avoiding unnecessary complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses film deposition on the diaphragm vacuum gauge, preventing shifts in pressure measurement zero points and extending the maintenance cycle of critical components.
Implementation Method 1
at least one of the exhaust pipe or the branch pipe has an inner surface where a material that promotes consumption of the film formation gas is exposed
Data Source
AI summary
A processing apparatus includes: a processing container configured to be depressurized; a film formation gas supply path configured to supply a film formation gas into the processing container; an exhaust pipe connected to the processing container and configured to exhaust the film formation gas in the processing container; a branch pipe branching from the exhaust pipe; and a diaphragm vacuum gauge connected to the branch pipe, wherein at least one of the exhaust pipe or the branch pipe has an inner surface where a material that promotes consumption of the film formation gas is exposed.