Branched Flow Path for Uniform Chemical Liquid Dispensing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Chemical liquid dispensing apparatuses face challenges in maintaining uniform pressure and accuracy due to pressure differences between nozzles, leading to variations in dispensing speed and impact accuracy, especially when using high-viscosity inorganic materials for substrate treatment in display and semiconductor manufacturing.
Innovation Solution
A chemical liquid dispensing apparatus with a branched flow path structure in the head assembly and pipe system, including a first flow path and a second flow path that distribute pressure uniformly to multiple nozzles, reducing pressure deviations and ensuring consistent dispensing speed and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If chemical liquid flows through a conventional pipe structure to multiple nozzles, then the dispensing apparatus can operate with simple structure, but pressure difference occurs between nozzles adjacent to inlet and outlet, reducing dispensing accuracy
Solution Approach 1:
The pipe structure is segmented into multiple flow paths (first flow path and second flow path) that branch from the inlet. Each flow path is designed to supply chemical liquid to different nozzle groups, allowing independent pressure control and balancing to eliminate pressure differences between nozzles.
Solution Approach 2:
The flow paths are designed with equal lengths and symmetrical configurations to create equipotential conditions for chemical liquid pressure distribution. This ensures that all nozzles receive chemical liquid at approximately the same pressure, eliminating the pressure gradient that occurs in conventional single-path structures.
2Productivity
If multiple head assemblies are used to dispense chemical liquid, then productivity increases, but pressure variation occurs in each head assembly, causing difference in dispensing speed and reducing impact accuracy
Solution Approach 1:
The system is segmented into multiple head assemblies, each with its own branched flow path structure. This allows each head assembly to operate independently with optimized pressure distribution, maintaining high productivity while ensuring uniform dispensing speed and impact accuracy across all nozzles in each assembly.
Solution Approach 2:
Each head assembly is designed with local pressure balancing through symmetrical flow paths, ensuring that pressure conditions are optimized locally for each nozzle group. This local quality control ensures uniform dispensing performance across multiple head assemblies while maintaining high overall productivity.
3Reliability
If chemical liquid with high viscosity is used for substrate treatment, then the chemical liquid can effectively treat substrates in display and semiconductor manufacturing, but pressure difference between nozzles is amplified, reducing uniformity of dispensing
Solution Approach 1:
The symmetrical flow path design creates equipotential conditions that are particularly effective for high-viscosity chemical liquids. By ensuring equal flow path lengths and balanced pressure distribution, the system compensates for the high resistance to flow, maintaining uniform dispensing speed and pressure across all nozzles despite the viscous nature of the chemical liquid.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces pressure and speed deviations between nozzles, enhancing the accuracy of chemical liquid impact on substrates by distributing pressure uniformly through the branched flow path structure, thereby improving the uniformity and precision of the dispensing process.
Implementation Method 1
The pressure of the chemical liquid around the inlet of the head assembly is high due to the chemical liquid newly flowing into the head assembly. The pressure of the chemical liquid around the outlet of the head assembly is low due to the chemical liquid discharged from the head assembly. Therefore, a pressure difference may occur between a nozzle adjacent to the inlet of the head assembly and a nozzle adjacent to the outlet thereof
Implementation Method 2
the first flow path is formed by a combination of a vertical section and an inclined section so that a horizontal section is omitted, and is symmetrical and is branched at the same angle and the same length
Data Source
AI summary
Provided is a chemical liquid dispensing apparatus including: a head assembly including a channel unit through which a chemical liquid flows, and multiple nozzles through which the chemical liquid flows from the channel unit and dispensing the chemical liquid onto a substrate; and a pipe connected to the head assembly and through which the chemical liquid passes, wherein the channel unit includes a first flow path having a branched structure, and a second flow path connected to the first flow path and supplying the chemical liquid to the multiple nozzles.