Branched Laser Power Checking for Groove Depth Consistency
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Solution Overview
Problem
Conventional laser processing apparatuses face issues with output power balance impairment due to polarizer deviation, leading to inconsistent groove depths during laser processing, which can cause blade meandering and low-k film exfoliation.
Innovation Solution
A laser processing apparatus with a branching unit that adjusts output power balance between multiple optical paths, incorporating a blocking member positioning system and an image pickup unit for precise control, allowing for the measurement and calculation of output power on each path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a laser beam is branched to multiple optical paths using a polarizer and polarizing beam splitter, then productivity is improved by simultaneous processing of multiple locations, but output power balance deteriorates due to polarizer rotational angle deviation
Solution Approach 1:
The patent introduces a power balance adjustment mechanism that performs preliminary adjustment of output power before the laser beams are used for processing. This allows the system to pre-correct any imbalances caused by polarizer deviation, ensuring that both optical paths receive equal power throughout operation, thus resolving the contradiction between maintaining productivity and ensuring power balance.
2Device complexity
If output power balance is not monitored and adjusted, then device complexity is reduced, but processing quality deteriorates due to groove depth variation
Solution Approach 1:
The patent incorporates a feedback mechanism where power meters continuously monitor the output power of each optical path, and the control unit automatically adjusts the power balance based on these measurements. This closed-loop feedback system ensures consistent groove depth without requiring complex manual intervention or overly complicated device architecture.
3Measurement precision
If a blocking member positioning system with image pickup unit is added for power measurement, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent uses a blocking member as an intermediary element that temporarily blocks one optical path to enable separate power measurements of individual beams. Combined with the image pickup unit, this allows precise measurement of each optical path's power without requiring complex simultaneous measurement systems, thus achieving high measurement precision with relatively simple device architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures accurate output power checking and balancing of laser beams, preventing groove depth variations and maintaining processing quality by allowing for real-time adjustment and measurement of laser beam power.
Implementation Method 1
a laser beam emitted from a laser beam generation unit is branched to two optical paths by a polarizer and a polarizing beam splitter
Implementation Method 2
a condenser configured to condense the laser beams branched by the branching unit on a processing face of the workpiece
Data Source
AI summary
A laser processing apparatus includes a branching unit configured to branch a laser beam to a first optical path and a second optical path, a condenser configured to condense the branched laser beams on a processing face of a workpiece, an output power measuring unit configured to measure the output power of the laser beam emitted from a laser beam generation unit and having passed through the condenser, and a blocking member positioning mechanism disposed between the condenser and the output power measuring unit and capable of positioning a blocking member between a first laser beam blocking position at which the blocking member blocks only the laser beam of the first optical path from between the branched laser beams and a retracted position at which the blocking member blocks none of the laser beams.