Branched Liquid Circulation for Multi-Processor Temperature Control

The patent merges multiple circulation functions into a single pump system. The pump circulates processing liquid through a circulation passage that includes multiple branch lines (first circulation line and second circulation line) with different path lengths. By controlling the flow through these branches with different resistance characteristics, the system achieves independent control of multiple circulation lines without requiring separate pumps for each line, thereby reducing device complexity while maintaining operational independence.

The patent segments the circulation system into multiple independent circulation lines (first circulation line and second circulation line) with different path lengths and resistance characteristics, all controlled by a single pump. This segmentation allows the system to achieve reliability through functional redundancy and independent control paths without requiring multiple pumps, thereby reducing apparatus cost while maintaining or improving reliability.

The patent employs dynamic flow control within a single pump system to meet the productivity requirements of multiple liquid processors. The circulation passage includes branch lines with different flow resistance characteristics that can be dynamically adjusted to allocate processing liquid flow rates according to the needs of different liquid processors. This dynamic control enables the single pump to adaptively provide sufficient flow rates to multiple processors simultaneously, maintaining productivity without increasing the number of pumps.