Branched Organopolysiloxane Composition for Fine Patterning
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Solution Overview
Problem
Existing high energy beam-curable organopolysiloxanes face challenges with alkali solubility, coatability, and high energy beam curability, limiting their use in high-precision patterning and insulating materials for electronic devices.
Innovation Solution
A curable branched organopolysiloxane with phenolic hydroxyl and epoxy groups, low molecular weight, and small polydispersity, forming a cage-like structure, which exhibits high solubility in aqueous alkali solutions and excellent high energy beam curability, enabling high-precision patterning and insulating properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If linear polysiloxane components are used to achieve high energy beam curability, then curability is improved, but alkali solubility deteriorates
Solution Approach 1:
The patent changes the molecular weight parameter and structural parameters of the polysiloxane from linear to cage-like structure, achieving both high energy beam curability and alkali solubility simultaneously. The specific parameter range of weight average molecular weight (1,000-10,000) and polydispersity (1.05-1.30) is optimized to balance curability and solubility.
Solution Approach 2:
The patent creates a composite molecular structure combining cage-like silsesquioxane units with phenolic hydroxyl groups and epoxy groups, achieving synergistic effects where the cage structure provides curability while the phenolic/epoxy groups provide alkali solubility and reactivity.
2Strength
If high molecular weight polysiloxane is used to improve mechanical strength, then strength is improved, but coatability and solubility deteriorate
Solution Approach 1:
The patent optimizes the weight average molecular weight to a specific range (1,000-10,000) and polydispersity (1.05-1.30), finding the optimal balance point where the material has sufficient mechanical strength after curing while maintaining excellent coatability and alkali solubility in the uncured state.
Solution Approach 2:
The patent introduces functional groups (phenolic hydroxyl and epoxy groups) at specific locations on the polysiloxane structure, creating local reactive sites that enhance both the mechanical properties of the cured film and the solubility of the uncured material without requiring high overall molecular weight.
3Ease of manufacture
If polysiloxane with large polydispersity is used to simplify synthesis, then manufacturing complexity is reduced, but patterning precision deteriorates
Solution Approach 1:
The patent specifies a controlled polydispersity range (1.05-1.30) that is narrow enough to ensure uniform patterning and line width but wide enough to allow practical synthesis. This parameter optimization enables high-precision lithography while maintaining manufacturing feasibility.
Solution Approach 2:
The patent employs preliminary controlled hydrolysis and condensation reactions with carefully controlled reaction conditions (catalyst selection, temperature, time) to pre-establish the desired molecular weight distribution and polydispersity before final product formation, ensuring consistent patterning performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The curable branched organopolysiloxane allows for easy removal of unreacted materials during development, forming transparent and mechanically strong films suitable for high-precision patterning and insulating layers in electronic devices.
Implementation Method 1
high energy beam-curable composition containing same... curable by actinic rays, for example high energy beams or electron beams
Implementation Method 2
curable branched organopolysiloxane with phenolic hydroxyl and epoxy groups... having a structure represented by general formula (1)
Data Source
AI summary
Provided is an organopolysiloxane having favorable fine patterning properties, favorable alkali solubility and favorable high energy beam-curability, and capable of forming a cured film having a high transparency and a practically sufficient mechanical strength when cured, and to provide, along with the use thereof, a high energy beam-curable composition containing the organopolysiloxane. A curable branched organopolysiloxane is represented by an average unit formula (1): (R3SiO1/2)a(R2SiO2/2)b(RSiO3/2)c(SiO4/2)d(O1/2Z)e(wherein R is a group selected from a monovalent hydrocarbon group, an alkoxy group, a hydroxyl group, an epoxy group-containing group, and a phenolic hydroxyl group-containing group; 0≤a, 0≤b, 0<c, 0≤d, 0≤e, 0.8≤c/(a+b+c+d+e); and the molecule has at least one phenolic hydroxyl group-containing group therein). The organopolysiloxane has a weight average molecular weight of 4,500 or less and a polydispersity of 1.3 or less.