Die Interconnect Substrate Bridge Die Embedding

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Solution Overview

Problem

Current semiconductor package designs face challenges in reducing device size and cost due to large bump pitch between solder structures, which limits miniaturization and increases production expenses.

Innovation Solution

A method for forming a die interconnect substrate involves placing a bridge die in a multilayer substrate with lithographically defined via portions, reducing bump pitch by forming electrically conductive material in mask layer openings, and using a filler structure to stabilize the bridge die, allowing for smaller semiconductor devices and lower costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If traditional solder structures with large bump pitch are used, then manufacturing process is simpler, but device size increases and production costs increase

Engineering Contradiction:
Improvedevice sizeVSAvoidmanufacturing process complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent divides the interconnect structure into multiple segments: bridge dies with integrated interconnects are segmented and embedded within the multilayer substrate. This segmentation allows reduction of bump pitch while maintaining manufacturing feasibility through modular assembly of bridge dies and substrate layers

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar interconnect布局 to three-dimensional embedding of bridge dies within substrate layers. By utilizing vertical stacking and embedding bridge dies at different levels, the design reduces lateral bump pitch while adding vertical dimensionality to the interconnect architecture

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If bridge die is embedded in multilayer substrate, then bump pitch is reduced, but manufacturing process becomes more complex

Engineering Contradiction:
Improvebump pitchVSAvoidmanufacturing process
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

Bridge dies are pre-fabricated with integrated interconnect structures before embedding in the multilayer substrate. This preliminary preparation of bridge dies with pre-formed interconnects simplifies the overall manufacturing process by separating die fabrication from substrate assembly operations

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces filler material as an intermediary substance to stabilize bridge dies during embedding and to fill gaps between bridge dies and substrate. This intermediary filler simplifies the manufacturing process by providing mechanical support and enabling easier integration of bridge dies into the multilayer structure

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If filler structure is added to stabilize bridge die, then device stability improves, but device complexity increases

Engineering Contradiction:
Improvebridge die stabilityVSAvoidstructure complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The filler material is selected to have properties matching the surrounding substrate materials, creating a homogeneous interface between filler, bridge die, and substrate. This homogeneity provides stabilization without introducing significant structural complexity or material incompatibilities

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of smaller semiconductor devices with reduced bump pitch, leading to improved current carrying capabilities and lower production costs by minimizing the distance between solder structures and stabilizing the bridge die.

Implementation Method 1

removing portions of the mask layer to form openings exposing at least part of the first bridge die pad and the second bridge die pad by a lithographic process

Methodology Applied
Scientific EffectLithography: Photography

Implementation Method 2

forming electrically conductive material in the openings of the mask layer to form a via portion on the first bridge die pad

Methodology Applied
Scientific EffectElectroplating: Electroplating

Data Source

PatentUS10978399B2Die interconnect substrate, an electrical device, and a method for forming a die interconnect substrate
Publication Date: 2021.04.13 TAHOE RES LTD
  • US10978399B2 patent drawing
  • US10978399B2 patent drawing
  • US10978399B2 patent drawing

AI summary

A die interconnect substrate comprises a bridge die comprising at least one bridge interconnect connecting a first bridge die pad of the bridge die to a second bridge die pad of the bridge die. The die interconnect substrate comprises a multilayer substrate structure comprising a substrate interconnect, wherein the bridge die is embedded in the multilayer substrate structure. The die interconnect substrate comprises a via portion formed on the first bridge die pad of the bridge die. An average angle between a surface of the first bridge die pad and a sidewall of the via portion lies between 85° and 95°.