Broadband Optical Device with Interfacial Layer Control

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Solution Overview

Problem

Conventional Si CMOS image sensors have limitations in responsivity, external quantum efficiency, detectivity, and response time, especially when operating in broadband wavelength regions, including visible and infrared light.

Innovation Solution

A broadband multi-purpose optical device is designed with a semiconductor layer, a first active layer having a different light absorption band, a two-dimensional material layer, and interfacial layers to control potential pinning, allowing for a tandem structure with multiple active and 2D material layers to enhance light absorption across a wide spectrum.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional Si CMOS image sensor is used, then the device can be manufactured with high process stability and reliability, but the responsivity and external quantum efficiency are insufficient in broadband wavelength regions

Engineering Contradiction:
Improveprocess stabilityVSAvoidresponsivity
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent employs a composite structure combining Si CMOS substrate with multiple active layers having different bandgaps (e.g., Ge, InGaAs) and two-dimensional material layers (e.g., graphene, MoS2). This composite architecture enables the device to maintain the manufacturing reliability of Si CMOS while achieving enhanced responsivity across broadband wavelengths by leveraging the complementary optical absorption characteristics of each material layer

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent divides the optical detection function into multiple specialized layers, each optimized for specific wavelength ranges. The Si CMOS layer handles visible light, while additional active layers and 2D material layers are segmented to detect specific infrared bands, allowing each segment to operate at optimal performance without compromising the overall device reliability

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If a conventional Si CMOS image sensor is used, then the manufacturing process is simple and cost-effective, but the external quantum efficiency is insufficient in broadband regions

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidexternal quantum efficiency
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent incorporates preliminary action by pre-optimizing the bandgap composition and thickness of each active layer during the manufacturing process. The multi-layer structure is designed in advance with specific materials (Ge, InGaAs, 2D materials) and configurations that are deposited or grown directly on the Si CMOS substrate, enabling high external quantum efficiency to be built-in during fabrication rather than requiring post-manufacturing adjustments

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If the wavelength region band is widened to broadband region, then the application range is expanded, but the detectivity and response time of Si based image sensor deteriorate

Engineering Contradiction:
Improvewavelength rangeVSAvoiddetectivity
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent applies local quality by assigning different material compositions and optical properties to different layers based on their specific wavelength detection needs. Each active layer and 2D material layer is locally optimized for its target wavelength range, with materials like Ge for mid-infrared and graphene for broad-spectrum detection, thereby maintaining high detectivity across the entire broadband range rather than using a uniform material throughout

Inventive Principle:
Principle #3Local quality

4Measurement precision

If multiple active layers and 2D material layers are stacked to enhance broadband absorption, then the light absorption capability is improved, but the device structure becomes more complex

Engineering Contradiction:
Improvelight absorption capabilityVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements a nested doll structure where multiple active layers and 2D material layers are sequentially stacked and integrated on top of the Si CMOS substrate in a compact configuration. Each layer is nested within the overall device architecture, with interfacial layers and contact structures that seamlessly connect the components, thereby achieving enhanced broadband absorption while managing structural complexity through hierarchical integration

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves improved optical characteristics, including higher responsivity and external quantum efficiency across visible and infrared regions, enabling effective light detection and absorption in a broad wavelength range.

Implementation Method 1

a semiconductor layer having a light absorption characteristic

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

a first active layer having a light absorption band different from a light absorption band of the semiconductor layer

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 3

a first interfacial layer configured to control a pinning potential of the semiconductor layer and the first active layer

Methodology Applied
Scientific EffectPinning potential control:

Implementation Method 4

a two-dimensional (2D) material layer adjacent to the first active layer

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS11367799B2Broadband multi-purpose optical device and methods of manufacturing and operating the same
Publication Date: 2022.06.21 SAMSUNG ELECTRONICS CO LTD
  • US11367799B2 patent drawing
  • US11367799B2 patent drawing
  • US11367799B2 patent drawing

AI summary

A broadband multi-purpose optical device includes a semiconductor layer having a light absorption characteristic, a first active layer having a light absorption band different from a light absorption band of the semiconductor layer, a first two-dimensional (2D) material layer adjacent to the first active layer, and a first interfacial layer configured to control a pinning potential of the semiconductor layer and the first active layer. The broadband multi-purpose optical device may further include at least one second active layer, and may include a tandem structure that further includes at least one second 2D material layer. The first active layer and the second active layer may have different light absorption bands. The broadband multi-purpose optical device may further include a second interfacial layer adjacent to the first 2D material layer.