Cleaning Brush Shape Correction for Substrate Treatment
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Solution Overview
Problem
Existing substrate treatment apparatuses face issues with the deformation of cleaning brushes, leading to variations in substrate contact size, which affects cleaning efficiency and increases the likelihood of substrate soiling after repeated cleaning processes.
Innovation Solution
The substrate treatment apparatus incorporates a cleaning brush with an elastically deformable brush body and a correcting member that maintains the substrate contact portion's size by using a design brush and correcting member to restrain expansion, ensuring consistent contact with the substrate through a relative-positioning and rotating mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cleaning brush is repeatedly used for substrate cleaning, then the brush body deforms and the substrate contact portion size varies, but maintaining consistent contact size is needed for effective cleaning
Solution Approach 1:
The patent applies parameter changes by introducing a correcting member that dynamically adjusts the brush body's physical parameters (shape and contact portion size) during the cleaning process. The correcting member modifies the brush body's deformation state through controlled contact, ensuring the substrate contact portion maintains its intended size and shape characteristics despite repeated use and elastic deformation.
Solution Approach 2:
The patent implements feedback through the correcting member mechanism that continuously monitors and corrects the brush body's shape during operation. The correcting member acts as a feedback element that detects deviations in the substrate contact portion size and applies corrective force to restore the intended geometry, ensuring consistent cleaning performance across multiple substrate treatments.
2Adaptability or versatility
If the brush body is made elastically deformable for cleaning flexibility, then cleaning adaptability improves, but contact portion size stability deteriorates
Solution Approach 1:
The patent introduces a correcting member as an intermediary element between the brush body and the substrate. This correcting member mediates the interaction by providing controlled support to the elastically deformable brush body, preventing excessive deformation while allowing sufficient flexibility for cleaning adaptation. The correcting member acts as a buffer that maintains dimensional stability of the substrate contact portion despite the brush body's elastic properties.
3Device complexity
If no correcting mechanism is used, then device complexity is low, but cleaning effectiveness decreases due to brush deformation
Solution Approach 1:
The patent applies segmentation by dividing the cleaning system into distinct functional components: the brush body for cleaning action, the correcting member for shape maintenance, and the substrate contact portion for actual cleaning. This segmentation allows each component to be optimized independently - the brush body can be highly deformable for adaptability while the correcting member provides the necessary structural support, achieving high cleaning efficiency without excessive overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces variations in substrate contact size, enhancing cleaning efficiency and preventing substrate soiling by maintaining the brush's shape and contact integrity during the cleaning process.
Implementation Method 1
a cleaning brush including a brush body which is elastically deformable
Data Source
AI summary
A substrate treatment apparatus includes a brush moving mechanism which moves a shaft to which a cleaning brush is attached. The brush body includes a substrate contact portion of a pillar-shaped portion. The substrate treatment apparatus further includes a correcting member and a relatively-positioning mechanism. When the correcting member is placed in a target position, a contact portion of the correcting member overlaps an object portion which is a combination of a design contact portion and a belt-shaped annular portion in an outer surface of a design pillar-shaped portion of a design body of a design brush. The contact portion is formed to have an inverted shape of the object portion of the design brush, and a portion of the contact portion, which corresponds to the belt-shaped annular portion, is a center-axis facing surface which faces a center axis of the shaft.