Bubbler Splashguard Baffle Disc Deflector Ledge
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Solution Overview
Problem
Existing chemical precursor containers for CVD processes face issues with liquid droplets and aerosol formation during vapor delivery, leading to corrosion, uneven flow, and particulate generation, especially under high vacuum or high pressure conditions, requiring frequent container changes and increased costs.
Innovation Solution
A container design featuring a diptube inlet, a baffle disc, and an annular radially inward projecting deflector ledge that creates a tortuous flow path to minimize liquid droplet entry into the outlet, allowing efficient vapor delivery even at high vacuum or high flow rates, with a level sensor to monitor liquid levels and prevent splashing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional bubblers are used for vapor delivery, then chemical precursor can be delivered to the tool, but liquid droplets and aerosol formation occur leading to corrosion, uneven flow, and particulate generation
Solution Approach 1:
A baffle disc is introduced as an intermediary component between the liquid chemical precursor and the outlet. The baffle disc intercepts rising bubbles and liquid droplets, allowing vapor to pass through while preventing liquid and aerosol from reaching the outlet, thus eliminating the harmful contamination effect
Solution Approach 2:
The interior of the bubbler is segmented into distinct zones: a lower liquid level zone, a middle baffle disc zone, and an upper vapor outlet zone. This segmentation creates physical barriers that separate the liquid phase from the vapor outlet, preventing droplet carryover while maintaining vapor delivery
2Productivity
If high flow rates or high vacuum conditions are applied to increase productivity, then vapor delivery efficiency improves, but liquid splashing and aerosol formation increase
Solution Approach 1:
The baffle disc acts as a mediator that allows high flow rates and vacuum conditions to be maintained for productivity while simultaneously intercepting the harmful aerosol droplets generated under these conditions, preventing them from reaching the outlet
Solution Approach 2:
The high flow rates and vacuum conditions that originally caused harmful aerosol generation are converted into beneficial forces: the strong upward flow drives vaporization efficiency while the baffle disc captures the resulting aerosol, transforming the harmful effect into a mechanism that enhances vapor delivery while maintaining purity
3Object-affected harmful factors
If splashguard components are added to prevent liquid droplet entry, then contamination is reduced, but device complexity increases
Solution Approach 1:
The complex protection function is segmented into two simple components: a baffle disc for intercepting rising droplets and a deflector ledge for redirecting liquid flow. This segmentation achieves comprehensive protection while keeping each individual component simple and easy to manufacture
4Loss of time
If container is used to full capacity to reduce loss of time, then container changes are reduced, but liquid level control becomes critical to prevent splashing
Solution Approach 1:
The baffle disc and deflector ledge are pre-positioned within the container to automatically protect against splashing at any liquid level. This preliminary protective structure allows the container to be filled to full capacity without risk of splashing, eliminating the need for frequent level monitoring and container changes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design ensures consistent vapor delivery, reduces semiconductor tool downtime, and minimizes particulate generation by preventing aerosol droplet formation, enabling full container usage and reducing container processing fees.
Implementation Method 1
A container design featuring a diptube inlet, a baffle disc, and an annular radially inward projecting deflector ledge that creates a tortuous flow path to minimize liquid droplet entry into the outlet
Implementation Method 2
passing a carrier gas through a diptube of the container; entraining liquid chemical precursor from the container into the carrier gas
Implementation Method 3
entraining liquid chemical precursor from the container into the carrier gas
Data Source
AI summary
The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.