Semiconductor Buffer Layer Layout for Optical Crosstalk Suppression

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Solution Overview

Problem

The challenge is to improve the light output efficiency of semiconductor structures while minimizing lateral propagation of light, which is essential for reducing optical crosstalk and enhancing modulation speed in optoelectronic devices.

Innovation Solution

A semiconductor structure is designed with a substrate, a buffer layer having distinct regions, and a light-emitting structure. The buffer layer includes a photoresist structure formed by selectively etching the second region, which suppresses lateral light propagation. Additionally, a light-output structure is created by etching the first region to enhance light extraction efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the LED size is reduced to improve modulation speed, then the modulation speed is improved, but optical crosstalk occurs during coupling to the optic fiber

Engineering Contradiction:

Improvemodulation speedVSAvoidoptical crosstalk

Core Design Contradiction:

SpeedVSObject-affected harmful factors

Solution Approach 1:

The buffer layer is segmented into a first region and a second region, with the light-emitting structure positioned only in the first region. This spatial segmentation prevents lateral light propagation to adjacent areas, thereby reducing optical crosstalk while maintaining small LED size for high modulation speed.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the buffer layer are given different functions: the first region supports light emission while the second region suppresses lateral propagation. This local differentiation allows the LED to achieve high modulation speed through size reduction without suffering from optical crosstalk.

Inventive Principle:

Principle #3Local quality

2Speed

If the LED size is reduced to improve modulation speed, then the modulation speed is improved, but light output efficiency decreases

Engineering Contradiction:

Improvemodulation speedVSAvoidlight output efficiency

Core Design Contradiction:

SpeedVSLoss of energy

Solution Approach 1:

The buffer layer is designed with region-specific properties where the first region optimizes light emission and the second region suppresses lateral propagation. This local optimization ensures that even small LEDs maintain high light output efficiency while achieving high modulation speed.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The potential harm of reduced light output efficiency in small LEDs is converted into a benefit by introducing the second region that suppresses lateral light propagation. This converts what would be energy loss into directed light output, improving overall efficiency while maintaining small size for high modulation speed.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Object-affected harmful factors

If a photoresist structure is added to suppress lateral light propagation, then optical crosstalk is reduced, but device complexity increases

Engineering Contradiction:

Improveoptical crosstalkVSAvoidstructure complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The photoresist structure is merged with the buffer layer, forming an integrated structure where the buffer layer itself provides both support and lateral propagation suppression functions. This reduces device complexity by combining multiple functions into a single integrated component.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The buffer layer is designed to serve multiple functions: mechanical support, light emission support in the first region, and lateral propagation suppression in the second region. This multi-functionality reduces the need for separate components, thereby reducing device complexity while effectively suppressing optical crosstalk.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution effectively suppresses lateral light propagation, reduces optical crosstalk, and improves light output efficiency by guiding light emission through specific regions of the buffer layer, thereby enhancing the performance of semiconductor-based optoelectronic devices.

Implementation Method 1

the photoresist structure is configured to suppress lateral propagation of light emitted by the light-emitting structure

Methodology Applied

Scientific EffectLight propagation suppression:

Implementation Method 2

the light-output structure is configured to improve light output efficiency of the light-emitting unit

Methodology Applied

Scientific EffectLight emission guidance:

Data Source

PatentUS20250151486A1Semiconductor structure and preparation method thereof

Publication Date: 2025.05.08 ENKRIS SEMICON

AI summary

Provided are a semiconductor structure and a preparation method thereof. The semiconductor structure includes a substrate, a buffer layer located on the substrate and a light-emitting structure located on a side of the buffer layer away from the substrate. The buffer layer includes a first region and a second region surrounding the first region. The semiconductor structure further includes a photoresist structure. The photoresist structure is formed by selectively etching the second region of the buffer layer, and the photoresist structure is configured to suppress lateral propagation of light emitted by the light-emitting structure. The light-emitting structure includes a light-emitting unit, and the light-emitting unit is disposed corresponding to the first region.