Buffer Load Unit for Substrate Transfer Speed
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Solution Overview
Problem
Current substrate processing apparatuses face inefficiencies in transferring substrates due to the low speed of overhead hoist transport systems, leading to increased idle time and decreased productivity, especially as substrate sizes increase.
Innovation Solution
The substrate processing apparatus incorporates a buffer load unit and transfer units that allow for horizontal movement and vertical transfer of containers between load and buffer ports, reducing reliance on slow overhead hoist transport by using transfer units to move containers between load and buffer ports, thereby improving transfer efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If overhead hoist transport is used to transfer FOUPs, then the system is simple and reliable, but the transfer speed is low causing increased idle time
Solution Approach 1:
A buffer load unit is introduced as an intermediary between the main load unit and the process module. The buffer load unit temporarily stores FOUPs and enables parallel operations: while one FOUP is being processed, another can be loaded into the process module from the buffer, eliminating idle time. This mediator component decouples the transfer speed limitation from the processing throughput.
Solution Approach 2:
FOUPs are pre-loaded into the buffer load unit before the process module becomes available. This preliminary action allows the system to have substrates ready for immediate processing without waiting for slow overhead hoist transport when the process module is ready, thus reducing equipment idle time.
2Productivity
If batch processor is used to clean substrates, then both sides of multiple substrates can be simultaneously processed, but the size and chemical consumption increase with substrate size
Solution Approach 1:
The batch processor is segmented into multiple independent process chambers (first process chamber, second process chamber, etc.), each capable of handling substrates independently. This segmentation allows parallel processing of multiple substrates in different cleaning stages simultaneously, maintaining high productivity while using smaller, more efficient chambers that consume less chemical per chamber compared to one large batch processor.
3Quantity of substance
If single processor is used to clean substrates, then chemical consumption is reduced, but substrates are processed one at a time reducing productivity
Solution Approach 1:
The system segments the substrate cleaning process into multiple single-processor chambers arranged in sequence. Each chamber processes one substrate at a time with controlled chemical consumption, but the overall system achieves batch-level productivity through parallel operation of multiple chambers and the buffer load unit that enables continuous substrate flow through the process modules.
Data Source
AI summary
A substrate processing apparatus includes a main load unit, a buffer load unit, and a transfer unit. Containers each accommodating substrates are placed on the main load unit and the buffer load unit. The buffer load unit is disposed above the main load unit and movable into and outward from a process module. Therefore, more containers can be placed in the substrate processing apparatus without increasing the footprint of the substrate processing apparatus, and thus it is possible to reduce equipment idle time during which standby substrates wait before being processed, thereby improving productivity.