Buffer Tank Port Configuration for Supercritical Fluid Pressure Stability
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Solution Overview
Problem
In substrate processing apparatuses using high-pressure fluids, pressure fluctuations and pulsations are not effectively managed, leading to particles staying in the buffer tank, which can adversely affect the processing quality.
Innovation Solution
A supercritical fluid producing apparatus with a buffer tank design featuring separate inlet and outlet ports and a heater, along with a circulation line and pressure regulating valve, to absorb pressure fluctuations and prevent particle accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a buffer tank is used to absorb pressure fluctuations, then pressure stability is improved, but particles may stay and accumulate in the buffer tank
Solution Approach 1:
The buffer tank is segmented into an upper gas chamber and a lower liquid chamber with a clear interface. The inlet port is positioned at the bottom and the outlet port at the top, creating distinct flow paths that prevent particle accumulation while maintaining pressure stability through the gas-liquid interface.
Solution Approach 2:
Instead of the conventional single-port buffer tank design, this invention uses inverted port positioning with the inlet at the bottom and outlet at the top. This inversion creates a flow pattern where liquid enters from below, rises through the gas-liquid interface, and exits from above, preventing particles from settling and accumulating in the buffer tank.
2Device complexity
If a single port is used for both inlet and outlet, then device complexity is reduced, but pressure fluctuation absorption is insufficient
Solution Approach 1:
The single port is segmented into two separate ports: an inlet port positioned at the bottom and an outlet port positioned at the top. This segmentation enables the buffer tank to effectively absorb pressure fluctuations by allowing the gas-liquid interface to move between the ports, while also preventing particle accumulation through the created flow pattern.
Solution Approach 2:
The port configuration transitions from a single-point connection to a vertical distribution across different heights. By positioning ports at different vertical levels (bottom for inlet, top for outlet), the system utilizes the vertical dimension to create effective pressure fluctuation absorption and particle-free flow paths.
3Ease of manufacture
If the inlet and outlet ports are positioned at the same location, then manufacturing is simplified, but processing fluid stability is compromised
Solution Approach 1:
The conventional approach of positioning both ports at the same location is inverted by placing the inlet port at the bottom and the outlet port at the top. This inversion ensures that the processing fluid flows upward through the buffer tank, maintaining stability and preventing particle accumulation while remaining manufacturable.
Solution Approach 2:
Different locations within the buffer tank are assigned different functional qualities: the bottom region serves as the inlet zone for liquid entry, the middle region contains the gas-liquid interface for pressure fluctuation absorption, and the top region serves as the outlet zone for stable fluid discharge. This local differentiation ensures processing fluid stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively absorbs pressure fluctuations and prevents particle stagnation in the buffer tank, enhancing the substrate processing by ensuring a stable and clean processing fluid supply.
Implementation Method 1
a cooler connected to the gas supply line and configured to cool the gaseous processing fluid from the gas supply line so as to produce a liquid processing fluid
Implementation Method 2
a pump connected to the cooler and configured to send out the liquid processing fluid from the cooler by increasing a pressure of the liquid processing fluid
Implementation Method 3
a buffer tank connected to the pump and configured to absorb a pressure fluctuation or pulsation of the processing fluid from the pump
Implementation Method 4
a heating device connected to the buffer tank and configured to heat the processing fluid from the buffer tank
Implementation Method 5
a supercritical fluid supply line connected to the heating device and configured to send out a processing fluid in a supercritical state from the heating device
Data Source
AI summary
A supercritical fluid producing apparatus according to the present disclosure includes a gas supply line, a cooler, a pump, a buffer tank, a heating device, and a supercritical fluid supply line. An inlet port into which a processing fluid from the pump flows is formed at a predetermined position on the buffer tank, and an outlet port through which the processing fluid flows out is formed at a different position from the inlet port. The buffer tank includes a buffer tank body that stores the processing fluid from the pump, and a heater that heats the processing fluid sent into the buffer tank body.