Buffer Tank Segmentation for Gas Pressure and Purity
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Solution Overview
Problem
In substrate processing apparatuses, the low injection pressure of gases through long transfer pipes degrades the efficiency of gas injection into chambers, particularly during atomic layer deposition, leading to reduced purge efficiency and potential substrate contamination from impurities.
Innovation Solution
A buffer tank system with a first space and a second space of lesser volume, separated and connected via a filter and valve, increases gas pressure before injection into the chamber, and includes a heater to prevent gas liquefaction, while a filter prevents impurities from entering the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the storage part is spaced apart from the chamber to allow gas storage, then the gas storage capacity is improved, but the injection pressure of the gas deteriorates due to the long transfer pipe
Solution Approach 1:
The buffer tank is divided into a first space for gas storage and a second space for filtration, with the filter installed in the second space. This segmentation allows the storage function and filtration function to be separated spatially, enabling efficient gas storage while maintaining injection pressure through the filtration design.
Solution Approach 2:
The buffer tank acts as an intermediary component between the storage part and the chamber. By positioning the buffer tank closer to the chamber and equipping it with a filter, it serves as a mediator that maintains gas pressure while removing impurities, thus resolving the contradiction between storage capacity and injection pressure.
2Quantity of substance
If the transfer pipe is long to connect the spaced storage part to the chamber, then the gas storage capacity is improved, but the purge efficiency deteriorates due to low injection pressure
Solution Approach 1:
The buffer tank is segmented into a first space for gas storage and a second space for filtration. This segmentation enables the system to maintain high injection pressure for purge gas by positioning the buffer tank closer to the chamber, thereby improving purge efficiency while retaining adequate gas storage capacity.
Solution Approach 2:
The buffer tank serves as an intermediary that improves purge efficiency by being positioned closer to the chamber. It maintains high injection pressure for purge gas operations while still providing sufficient gas storage capacity, thus resolving the contradiction between storage capacity and purge efficiency.
3Reliability
If the filter is installed in the second space of the buffer tank, then the purification of gas is improved, but the device complexity increases
Solution Approach 1:
The buffer tank is divided into a first space for gas storage and a second space for filtration. This segmentation allows the filter to be installed in a dedicated second space, improving gas purification while organizing the device structure in a systematic manner that manages the complexity effectively.
4Reliability
If the heater is installed in the first space to prevent gas liquefaction, then the gas delivery reliability is improved, but the energy consumption increases
Solution Approach 1:
The heater is installed in the first space to preliminarily heat the gas before it enters the second space for filtration. This preliminary heating action prevents gas liquefaction during the subsequent filtration and delivery processes, ensuring reliable gas delivery while managing energy consumption through targeted heating.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The increased gas pressure enhances the injection efficiency of purge gases and source/reactant gases, improving deposition rates and preventing substrate contamination by ensuring high-pressure gas delivery and filtration of impurities.
Implementation Method 1
a filter installed in the second body so as to be disposed in the second space
Implementation Method 2
A heater may be installed in the first body so as to be disposed in the first space
Data Source
AI summary
In accordance with an exemplary embodiment, a buffer tank that supplies a gas into a chamber in which a substrate is processed includes: a first body having, therein, a first space accommodating a gas; a second body having a second space having a volume less than that of the first space and accommodating a gas and installed in the first space; and a filter installed in the second body so as to be disposed in the second space. In accordance with exemplary embodiments, a gas supplied from a gas supply unit may remain in the buffer tank for a predetermined time, and inner pressure of the buffer tank may increase. Thus, pressure of the gas discharged from the buffer tank may increase, and accordingly, injection pressure of the gas injected into the chamber connected with the buffer tank may increase.