Buffered Gas Pressure Balance Valve for Sudden Pressure Release

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Solution Overview

Problem

Existing one-way valves in semiconductor manufacturing processes are prone to damage due to sudden pressure increases and releases, which cause irreversible impact on the valve.

Innovation Solution

A gas pressure balance valve comprising a valve body, a one-way valve, and a buffer assembly, where the buffer assembly is located between the gas inlet end and the one-way valve to adjust the pressure on the surface of the one-way valve, thereby protecting it from sudden pressure impacts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a one-way valve is used to maintain pressure balance in a chamber, then the pressure balance capability is improved, but the valve is prone to damage from sudden pressure increases and releases

Engineering Contradiction:

Improvepressure balance capabilityVSAvoidvalve durability

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

A buffer assembly is introduced between the chamber and the one-way valve to cushion sudden pressure changes. The buffer assembly includes a buffer chamber that gradually adjusts pressure before it reaches the one-way valve, preventing direct impact from sudden pressure increases or releases and protecting the valve from damage.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The buffer assembly acts as an intermediary component between the chamber and the one-way valve. It mediates the pressure transmission by gradually adjusting pressure through the buffer chamber, preventing sudden pressure changes from directly impacting the one-way valve while maintaining the pressure balance function.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Speed

If pressure adjustment is performed directly on the one-way valve, then the pressure balance response speed is improved, but the valve suffers irreversible impact and damage

Engineering Contradiction:

Improvepressure balance response speedVSAvoidvalve integrity

Core Design Contradiction:

SpeedVSReliability

Solution Approach 1:

The buffer assembly provides beforehand cushioning by gradually adjusting pressure before it reaches the one-way valve. This cushioning effect prevents sudden pressure changes from causing irreversible impact on the valve, ensuring both response effectiveness and valve integrity.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The buffer assembly converts the potentially harmful sudden pressure changes into beneficial gradual pressure adjustments. By transforming the sharp pressure waves into smooth pressure transitions, the system maintains fast response capability while protecting the valve from damage.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Data Source

PatentUS12281723B2Gas pressure balance valve, gas pressure balance method, and load locking chamber

Publication Date: 2025.04.22 CHANGXIN MEMORY TECH INC

AI summary

A gas pressure balance valve includes a valve body, a one-way valve and a buffer assembly. The valve body includes a gas inlet end and a gas outlet end, the gas inlet end is connected with a first gas pressure area, the gas outlet end is connected with a second gas pressure area, and a pressure difference is existed between the first gas pressure area and the second gas pressure area. The one-way valve is located in the valve body, and configured to achieve the balance between the pressures of the first gas pressure area and the second gas pressure area. The buffer assembly is located between the gas inlet end and the one-way valve, and configured to adjust the pressure on the surface of the one-way valve.