Bulk Acoustic Wave Resonator Sensor High Sensitivity
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Solution Overview
Problem
Surface acoustic wave (SAW) sensors have low quality factors and sensitivity, making them difficult to miniaturize and integrate, which limits their suitability for sensing various types of samples effectively.
Innovation Solution
A bulk acoustic wave resonator (BAWR) sensor system is developed, comprising a signal BAWR and a reference BAWR, each with specific substrates, air cavities, piezoelectric layers, electrodes, and coated layers, that measure resonance frequencies before and after interaction with a target material, allowing for precise sensing based on frequency changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If SAW sensor is used, then sensing capability is provided, but quality factor and sensitivity are low
Solution Approach 1:
The patent replaces surface acoustic wave (SAW) technology with bulk acoustic wave resonator (BAWR) technology. This substitution fundamentally changes the acoustic wave generation and detection mechanism, transitioning from surface waves to bulk waves, which inherently provides higher quality factor and sensitivity for sensing applications.
Solution Approach 2:
The patent changes the operating parameters by using bulk acoustic waves instead of surface acoustic waves. This parameter change in the physical phenomenon utilized results in improved quality factor and sensitivity, as bulk waves have better confinement and lower energy loss compared to surface waves.
2Volume of moving object
If SAW sensor is used, then sensing function is achieved, but device size cannot be reduced
Solution Approach 1:
The patent substitutes SAW sensor structure with BAWR sensor structure, which has a fundamentally different acoustic wave mechanism. This substitution enables miniaturization because bulk waves can be confined within a smaller volume compared to surface waves, allowing the sensor to maintain high performance while reducing size.
Solution Approach 2:
The patent transitions from two-dimensional surface wave propagation to three-dimensional bulk wave resonance. This dimensional change allows for compact sensor design by utilizing the vertical dimension for wave confinement, thereby reducing the overall device footprint while maintaining sensing performance.
3Productivity
If SAW sensor is used, then sensing is possible, but integration and arrangement are difficult
Solution Approach 1:
The patent replaces the complex surface wave guiding structures with simpler bulk wave resonator structures. This substitution simplifies the device architecture, making it more amenable to integration and arrangement in compact configurations, thereby improving productivity and ease of manufacturing.
Solution Approach 2:
The patent employs segmented resonator structures that can be independently fabricated and then integrated. This segmentation approach simplifies the overall device complexity by allowing modular assembly of multiple sensing elements, making integration and arrangement more manageable compared to monolithic SAW sensor designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The BAWR sensor system achieves higher sensitivity and reduced power consumption compared to SAW sensors, enabling improved sensing effects in specific frequency ranges and reduced power expenditure, with potential applications in pressure and temperature sensing.
Implementation Method 1
a first piezoelectric layer, a first upper portion electrode, and a coated layer, which are laminated on a top of the first air cavity
Implementation Method 2
a signal BAWR that measures a resonance frequency that is modified due to a reaction with a target material
Data Source
AI summary
A bulk acoustic wave resonator (BAWR) sensor is provided. The BAWR sensor includes a signal BAWR that measures a resonance frequency that is modified due to a reaction with a target material, a reference BAWR that measures a reference resonance frequency without reaction with an external environment, and a sensing unit that senses the target material, based on the modified resonance frequency and the reference resonance frequency.