Bullet-head Light Guide for Scintillator Detection Efficiency

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Solution Overview

Problem

Conventional charged particle detection devices in scanning electron microscopes have low light receiving efficiency due to inefficient electron-to-light conversion and light signal collection, requiring large PMTs and introducing electric noise, which affects image brightness and contrast.

Innovation Solution

The design incorporates a bullet-head-shaped light guide and a frustum cone-shaped scintillator disc, aligned with the PMT, to enhance light collection efficiency through total reflection and reduce the need for reflective coatings, achieving improved light collection efficiency without increasing noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a conventional scintillator-PMT detection device is used, then the device can detect secondary electrons, but the light collection efficiency is low (25.23%)

Engineering Contradiction:
Improvelight collection efficiencyVSAvoiddetection efficiency
Core Design Contradiction:
Loss of energyVSProductivity

Solution Approach 1:

The light guide is designed with a bullet-head shape featuring curved surfaces that optimize light collection geometry. The curved interface between the light guide and scintillator disc, combined with the tapered bullet-head portion, maximizes the collection of photons emitted by the scintillator and directs them toward the PMT, achieving 78.83% light collection efficiency

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The invention changes the geometric parameters of the light guide and scintillator assembly. The light guide transitions from a conventional cylindrical shape to a bullet-head shape with specific dimensional ratios (length-to-diameter ratio optimized for total internal reflection). The scintillator disc is positioned at a specific distance from the PMT face (0.5-2.0 mm) to optimize light coupling, dramatically improving detection efficiency

Inventive Principle:
Principle #35Parameter changes

2Illumination intensity

If a large magnification PMT or magnifying circuit is used to compensate for low light collection efficiency, then enough brightness and contrast can be achieved, but larger electric noise is introduced into the image

Engineering Contradiction:
Improveimage brightnessVSAvoidelectric noise
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The invention converts the previously wasted light photons into useful signals by implementing total internal reflection at the bullet-head light guide interface. Photons that would have been lost are now reflected and directed to the PMT, providing sufficient brightness without requiring signal amplification that would introduce noise

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The bullet-head light guide acts as an intermediary that efficiently couples the scintillator disc to the PMT. The curved geometry and optimized dimensions of the light guide serve as a mediator to transport photons with minimal loss, eliminating the need for additional amplification stages that would add electrical noise to the detection system

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The new design improves light collection efficiency to 78.83% compared to 25.23% in conventional systems, reducing the need for large PMTs and minimizing electric noise, resulting in brighter and more contrasted images with reduced manufacturing costs.

Implementation Method 1

the bullet-head-shaped portion of the light guide can ensure total reflection of light within the light guide and improves light collection efficiency

Methodology Applied
Scientific EffectTotal reflection: Total Internal Reflection

Implementation Method 2

Secondary electrons and backscattered electrons emit from sample surface impinged on scintillator disc and, in response, generate light signals

Methodology Applied
Scientific EffectScintillation: Scintillation

Data Source

PatentUS8829451B2High efficiency scintillator detector for charged particle detection
Publication Date: 2014.09.09 ASML NETHERLANDS BV
  • US8829451B2 patent drawing
  • US8829451B2 patent drawing
  • US8829451B2 patent drawing

AI summary

An assembly for a charged particle detection device of high detection efficiency is described. The assembly comprising a metal grid for applying attractive potential to lure charged particles; a scintillator disc to absorb the energy from impinging charged particle and reemit the energy in form of light or photons; a light guide to transmit light or photons; and a photomultiplier tube (PMT) cohere with the end of light guide to receive light or photons from light guide and convert it into current signal. A light guide with a bullet-head-shaped front portion ensures total reflection of light propagating within the light guide. A frustum-cone-shaped scintillator disc releases the light that originally trapped in the scintillator disc due to the shape of scintillator.