Bundled Probe Group Grounding for Noise Measurement Accuracy
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Solution Overview
Problem
Conventional noise measurement systems for semiconductor devices face challenges due to increased grounding resistance with frequency, leading to voltage drops and inaccurate measurements, as well as cross-talk between devices causing oscillations and reduced accuracy.
Innovation Solution
A noise measurement system with multiple probe groups, each with bundled channels to reduce electromagnetic interference, connected to a circuit ground to minimize ground loop interference, and a controller for synchronized noise measurement using programmable parameters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If co-axial cables are used to shield each wire for accurate noise measurements, then electromagnetic interference is reduced, but grounding resistance increases with frequency causing voltage drops and measurement inaccuracies
Solution Approach 1:
The patent divides the grounding system into multiple independent ground connections for each probe group, eliminating the need for long cable runs that accumulate grounding resistance. Each probe group has its own local ground reference, segmenting the ground path to minimize resistance and voltage drops at high frequencies.
Solution Approach 2:
The patent introduces a ground isolation mechanism that acts as an intermediary between the probe groups and the main ground system. This allows each probe group to have its own ground reference without directly connecting to the main ground through high-resistance cable paths, thereby reducing the harmful effect of grounding resistance.
2Device complexity
If circuit ground terminals of multiple DUTs are connected together to a common ground, then grounding is simplified, but resistance is introduced allowing operations of one DUT to affect neighboring DUTs causing oscillations
Solution Approach 1:
The patent segments the grounding system by providing separate ground connections for each probe group and DUT combination. This eliminates the common ground path that causes oscillations between neighboring DUTs, as each device has its own independent ground reference, preventing mutual interference while maintaining system reliability.
3Productivity
If multiple probe groups are used for parallel noise measurements, then productivity increases, but electromagnetic interference among probe groups increases affecting measurement precision
Solution Approach 1:
The patent segments the probe groups into spatially separated units with dedicated ground connections and shielding. Each probe group operates with its own ground reference and is physically positioned to minimize electromagnetic coupling with other probe groups, allowing parallel measurements without mutual interference.
Solution Approach 2:
The patent implements local quality by providing each probe group with its own localized ground reference and shielding configuration optimized for that specific measurement location. This ensures that each probe group maintains measurement precision independent of other probe groups operating in parallel.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances measurement accuracy by reducing electromagnetic interference and ground loop effects, allowing for precise noise characterization of multiple devices without cross-talk, thereby improving the reliability of semiconductor device assessments.
Implementation Method 1
the multiple channels of each probe group are bundled as a group for reducing electromagnetic interference among the plurality of probe groups
Implementation Method 2
the group is shielded from corresponding signal groups of other DUTs with a connection to a circuit ground of the noise measurement system for reducing ground loop generated signal interference
Data Source
AI summary
Apparatuses of a noise measurement system and methods for using the same are disclosed. In one embodiment, a noise measurement system may include a plurality of probe groups electrically coupled to a plurality of DUTs, where a probe group in the plurality of probe groups includes multiple channels, and where the multiple channels of each probe group are bundled as a group for reducing electromagnetic interference among the plurality of probe groups, and wherein the group is shielded from corresponding signal groups of other DUTs with a connection to a circuit ground of the noise measurement system for reducing ground loop generated signal interference. The noise measurement system may further include a controller configured to perform noise measurement.