Buried Bragg Reflector for Optical Attack Mitigation

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Solution Overview

Problem

Existing techniques are inadequate in preventing backside optical attacks on integrated circuits, which can lead to the unauthorized decryption of private keys and exposure of intellectual property, as they are prone to tampering and unable to effectively block light-based attacks.

Innovation Solution

A backside structure comprising a buried Bragg reflector with alternating grating layers of materials with different refractive indices, located under active devices on a semiconductor substrate, which reflects propagating optical waves and prevents light from reaching the active regions, thereby securing the integrated circuit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If package shielding is used to prevent optical attacks, then security against light-based attacks is improved, but the shielding is still prone to tampering and cannot effectively prevent decryption of private keys

Engineering Contradiction:
Improvesecurity against optical attacksVSAvoidvulnerability to tampering
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The harmful optical waves are extracted from the backside attack path by introducing a reflector structure that actively removes light before it can reach the active devices, converting the passive shielding approach into an active extraction mechanism that prevents optical information leakage

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

A reflector structure serving as an intermediary element is introduced between the backside environment and the active devices. This mediator consists of alternating material layers that actively interfere with and reflect optical waves, preventing them from reaching the sensitive circuit regions while maintaining package integrity

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a reflector structure with alternating materials is introduced to reflect optical waves, then protection against backside attacks is improved, but the device structure becomes more complex

Engineering Contradiction:
Improveprotection against backside optical attacksVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The reflector structure utilizes parameter changes in material properties, specifically alternating between materials with different refractive indices. This approach achieves effective optical reflection through well-established photonic principles while maintaining a systematic and manufacturable structure that balances protection capabilities with fabrication complexity

Inventive Principle:
Principle #35Parameter changes

3Reliability

If existing shielding techniques are used, then some level of security is provided, but they are unable to prevent uncovering of key technology and intellectual property

Engineering Contradiction:
Improvesecurity levelVSAvoidexposure of intellectual property
Core Design Contradiction:
ReliabilityVSLoss of information

Solution Approach 1:

The reflector structure implements preliminary anti-action by proactively reflecting and blocking optical waves before they can interact with the active devices. This preventive measure stops optical attacks at the interface level, preventing any potential information leakage about private keys or intellectual property from occurring in the first place

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure effectively mitigates backside optical attacks by reflecting light across a wide range of frequencies, protecting semiconductor devices from unauthorized access and ensuring the security of chip functionality.

Implementation Method 1

a buried structure comprising a buried Bragg reflector that reflects light away from active components in an integrated circuit

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Implementation Method 2

the plurality of grating layers comprising a first material comprising a first refractive index alternating with a second material comprising a second refractive index

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20220320015A1Backside structure for optical attack mitigation
Publication Date: 2022.10.06 GLOBALFOUNDRIES US INC
  • US20220320015A1 patent drawing
  • US20220320015A1 patent drawing
  • US20220320015A1 patent drawing

AI summary

The present disclosure relates to semiconductor structures and, more particularly, to a backside structure for optical attack mitigation and methods of manufacture. The structure includes: at least one device on a front side of a semiconductor substrate; and a plurality of grating layers under the at least one device. The plurality of grating layers includes at least a first material having a first refractive index alternating with a second material having a second refractive index.