Buried Waveguide Optical Interconnects for Thermal Management

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Solution Overview

Problem

In complex integrated circuits, signal propagation delay and heat dissipation challenges arise due to the limitations of low-k dielectric materials and increasing current densities, restricting the packing density and performance of metallization systems, especially in three-dimensional chip configurations.

Innovation Solution

Implementing an optical signal transmission system within the integrated circuit using opto-electronic components and optical waveguides to convert electrical signals into optical signals, which are then transmitted, reducing energy consumption and heat generation, and allowing for faster data transfer without significant signal propagation delay.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the metallization system is expanded in the height dimension to provide desired interconnect density, then the packing density of circuit elements is improved, but the parasitic RC time constants increase and heat dissipation capability deteriorates

Engineering Contradiction:
Improveinterconnect densityVSAvoidsignal propagation delay
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent replaces the electrical signal transmission mechanism (metallization system) with an optical signal transmission mechanism (waveguide system). Optical signals propagate through the waveguide with minimal interference from parasitic RC effects that plague electrical interconnects, thereby maintaining signal integrity while achieving high interconnect density in three-dimensional configurations.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces opto-electronic components as intermediary elements that convert electrical signals to optical signals for transmission through the waveguide, and then convert them back to electrical signals at the destination. This intermediary optical transmission system bypasses the limitations of direct electrical interconnects, enabling high-density three-dimensional integration without suffering from parasitic RC time constants.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the number of metallization layers is increased to provide desired interconnect density, then the packing density is improved, but the mechanical stability of low-k dielectric materials deteriorates

Engineering Contradiction:
Improveinterconnect densityVSAvoidmechanical stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The patent replaces the electrical interconnect structure (metallization layers with dielectric materials) with an optical interconnect structure (waveguide system). This substitution eliminates the mechanical stability issues associated with stacking multiple low-k dielectric layers, as the optical waveguide can be implemented with mechanically robust materials and structures that do not suffer from the same stability problems.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Speed

If the current density in metal lines is increased to provide desired signal transmission, then the signal propagation speed is improved, but the heat generation increases

Engineering Contradiction:
Improvesignal propagation speedVSAvoidheat generation
Core Design Contradiction:
SpeedVSTemperature

Solution Approach 1:

The patent replaces electrical signal transmission with optical signal transmission through waveguides. Optical signals carry information without the resistive heating effects that occur in electrical conductors. This allows for high-speed signal transmission through the waveguide without generating excessive heat, solving the fundamental problem of heat generation associated with high current density in metal interconnects.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Reliability

If the dielectric constant of dielectric materials is reduced to decrease parasitic RC time constants, then the signal propagation delay is reduced, but the mechanical stability deteriorates

Engineering Contradiction:
Improvesignal propagation delayVSAvoidmechanical stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent replaces the electrical interconnect system (where dielectric constant optimization is critical) with an optical interconnect system (waveguide). In the optical system, signal propagation is governed by optical properties rather than electrical properties, eliminating the trade-off between dielectric constant and mechanical stability that plagues electrical interconnect design.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances signal propagation speed, reduces local heat generation, and provides superior design flexibility by circumventing critical areas of the metallization system, while maintaining reduced thermal conditions, thus improving the overall performance and complexity of integrated circuits.

Implementation Method 1

an optical waveguide having a first end and a second end

Methodology Applied
Scientific EffectOptical waveguide: Waveguide (optics)

Implementation Method 2

a first opto-electronic component optically coupled to the first end of the optical waveguide... a second opto-electronic component optically coupled to the second end of the optical waveguide

Methodology Applied
Scientific EffectOpto-electronic conversion: Photoelectric Effect

Data Source

PatentUS8615145B2Semiconductor device comprising a buried waveguide for device internal optical communication
Publication Date: 2013.12.24 GLOBALFOUNDRIES US INC
  • US8615145B2 patent drawing
  • US8615145B2 patent drawing
  • US8615145B2 patent drawing

AI summary

In an integrated circuit device, such as a microprocessor, a device internal optical communication system is provided in order to enhance signal transfer capabilities while relaxing overall thermal conditions. Furthermore, the device internal optical data or signal transfer capabilities may result in superior operating speed and a high degree of design flexibility. The optical communication system may be applied as a chip internal system in single chip systems or as an inter-chip optical system in three-dimensional chip configurations provided in a single package.