Burst-Modulated Supercontinuum Source for Stable IC Metrology

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Solution Overview

Problem

Current metrology tools in IC manufacturing rely on limited broadband radiation sources, which lack efficiency and stability, particularly in high-volume semiconductor production where frequent component replacements are necessary.

Innovation Solution

A supercontinuum radiation source is developed, comprising a modulator that selectively provides bursts of pump laser radiation pulses and a hollow-core photonic crystal fiber that generates supercontinuum radiation upon receiving the modulated radiation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional broadband radiation sources are used in metrology tools, then the measurement function can be performed, but the stability and efficiency are insufficient leading to frequent component replacements

Engineering Contradiction:

Improvestability of broadband radiation sourceVSAvoidlifetime of radiation source component

Core Design Contradiction:

ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent employs periodic pulsed laser radiation instead of continuous radiation to excite the hollow-core photonic crystal fiber. The modulator selectively provides bursts of pulses at controlled repetition rates, creating periodic action that reduces thermal accumulation and stress on the fiber, thereby improving stability and extending component lifetime while maintaining measurement functionality.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The patent changes the operational parameters by using modulated pump laser radiation with variable repetition rates and burst patterns. By adjusting these parameters, the system optimizes the balance between radiation output stability and component stress, resolving the contradiction between reliability and component lifetime.

Inventive Principle:

Principle #35Parameter changes

2Productivity

If higher repetition rates are used in supercontinuum radiation generation, then productivity and measurement speed improve, but component stress and potential damage increase

Engineering Contradiction:

Improverepetition rate of radiation pulsesVSAvoidstress on hollow-core photonic crystal fiber

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

By implementing periodic pulsed operation with controlled duty cycles and burst patterns, the system achieves high repetition rates during active measurement periods while allowing rest periods that reduce cumulative stress on the fiber. This periodic action enables high productivity during operation while preventing excessive stress accumulation.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The system dynamically adjusts the repetition rate and burst patterns based on operational requirements. The modulator can vary the timing and intensity of pulse bursts, allowing the system to optimize between high-speed measurement modes and low-stress maintenance modes, thus resolving the contradiction between productivity and component stress.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the stability and efficiency of broadband radiation generation, potentially extending the lifetime of critical components and allowing for higher repetition rates, thus improving the robustness and accuracy of metrology applications in IC manufacturing.

Implementation Method 1

a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation

Methodology Applied

Scientific EffectSupercontinuum generation:

Implementation Method 2

hollow-core photonic crystal fiber

Methodology Applied

Scientific EffectPhotonic crystal effect: Photonic Crystal

Data Source

PatentUS12204229B2Supercontinuum radiation source and associated metrology devices

Publication Date: 2025.01.21 ASML NETHERLANDS BV

AI summary

A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.