Non-Circular Bush Insert for Anti-Rotation Electrode Assembly

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing semiconductor manufacturing processes face challenges in assembling plasma electrodes due to difficulties in securely coupling components, leading to issues with rotation and assembly efficiency.

Innovation Solution

A bush insert with a non-circular outer shape and a female screw structure on its inner surface, designed to fit within a recessed, rounded square insertion hole in the electrode plate, preventing rotation and facilitating easy assembly by engaging with a male screw structure on the bush.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional circular bush insert is used, then the assembly process is simple, but the bush insert rotates within the electrode plate causing assembly issues

Engineering Contradiction:
Improveanti-rotation capabilityVSAvoidinsert structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The bush insert employs a non-circular outer shape (e.g., square, rectangular, or polygonal) that corresponds to the shape of the insertion hole in the electrode plate. This asymmetric geometry prevents rotational movement of the bush insert within the hole, as the shaped outer surface can only fit in one orientation. The female screw structure on the inner surface further secures the bush in place while maintaining the anti-rotation benefit of the asymmetric outer shape.

Inventive Principle:
Principle #4Asymmetry

2Reliability

If a secure coupling mechanism is implemented, then assembly stability is improved, but assembly time increases

Engineering Contradiction:
Improveassembly stabilityVSAvoidassembly time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The bush insert is pre-formed with both the shaped outer surface and the female screw structure integrated into a single component. This preliminary preparation allows the bush to be directly inserted into the corresponding shaped hole in the electrode plate, where the geometry itself provides immediate anti-rotation capability. The male screw on the bush engages with the pre-formed female screw, creating secure coupling without requiring additional alignment steps or adjustment time during assembly.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If a non-circular shaped bush insert is used, then rotation is prevented, but manufacturing complexity increases

Engineering Contradiction:
Improverotation preventionVSAvoidmanufacturing ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The bush insert is designed as a separate, standalone component with the non-circular shape and female screw structure fully formed during its manufacturing process. This segmentation allows the bush insert to be manufactured independently using conventional machining or forming techniques, and then simply inserted into the electrode plate. The shaped outer surface and internal threading are created as integral features of the bush insert itself, avoiding the need for complex multi-step assembly processes or specialized manufacturing equipment.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20240274328A1Bush insert, bush assembly including the same and upper electrode assembling structure including the same
Publication Date: 2024.08.15 HANA MATERIALS INC
  • US20240274328A1 patent drawing
  • US20240274328A1 patent drawing
  • US20240274328A1 patent drawing

AI summary

Provided is a bush insert coupled to a plasma electrode plate. The bush insert is configured to provide an insert inner hole that passes through the bush insert in a first direction, an inner surface of the bush insert that defines the insert inner hole is configured to provide a female screw structure, and an outer surface of the bush insert has a non-circular shape in a plan view.