Butterfly Valve Pressure Control Using Predictive Rotation Angles
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Solution Overview
Problem
Conventional butterfly valve control methods for process chambers in semiconductor manufacturing suffer from time delays due to feedback-based pressure control, leading to reduced quality and reliability of the final product.
Innovation Solution
A butterfly valve control device and method that utilizes high-speed rotation information to pre-set rotation angles for pressure control, switching between first and second control modes based on pressure changes, and updates this information for precise and rapid pressure adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If feedback-based pressure control is used, then pressure control reliability is improved, but control time increases due to time delay
Solution Approach 1:
The system performs preliminary actions by predicting future pressure values based on current valve state and flow characteristics, then pre-calculates the optimal valve rotation angle needed to achieve target pressure. This allows the valve to be positioned in advance, eliminating feedback time delays while maintaining control reliability through predictive rather than reactive control.
Solution Approach 2:
The control system dynamically adapts between two modes: a fast-response mode that uses predictive algorithms for rapid pressure changes, and a precision mode that uses feedback for fine-tuning. This dynamic switching allows the system to achieve both rapid response and high reliability depending on the operational context.
2Productivity
If rapid pressure adjustment is implemented, then productivity is improved, but control precision may deteriorate
Solution Approach 1:
The pressure control process is segmented into two distinct phases: a rapid adjustment phase that uses predictive control for fast response, and a precision tuning phase that uses feedback control for accuracy. This segmentation allows each phase to optimize for its specific goal without compromising the other.
Solution Approach 2:
The system dynamically transitions between control strategies based on the operational phase. During rapid pressure changes, predictive control dominates for speed; during steady-state maintenance, feedback control dominates for precision. This dynamic adaptation resolves the contradiction between speed and precision.
Data Source
AI summary
A butterfly valve control device includes: a butterfly valve placed on a conduit line through which fluid communicates with an inside of a chamber and including a valve body in which a valve passage communicating with the conduit line is defined through an inner wall and including a plate that is connected to the valve body through a shaft and adjusts a flow rate of fluid passing through the valve passage according to rotation of the shaft in an axial direction; a valve drive unit that provides a rotational force to rotate the shaft; a valve control unit that provides a control signal to the valve drive unit to control a pressure in the chamber according to rotation of the plate in an axial direction; a first sensing unit that senses the pressure in the chamber and generates pressure information; and a memory that stores high-speed rotation information