By-Product Collection Apparatus with Dynamic Heating
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Solution Overview
Problem
In semiconductor processing, frequent process interruptions occur due to maintenance and repair requirements for cleaning by-product collection apparatuses, as existing systems are inefficient in utilizing internal space and often get blocked by collected by-products.
Innovation Solution
An apparatus with a chamber, heater, vortex forming member, and multiple collecting members that vary heating temperature in series to efficiently collect by-products, allowing for sequential collection from lower to upper regions within the chamber, thereby reducing maintenance and repair interruptions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If by-products are collected in a fixed region within the chamber, then the collection process is simple, but the internal space is not efficiently utilized and blockages occur frequently
Solution Approach 1:
The patent applies the dynamics principle by making the heating region movable through time-series temperature variation. The heater dynamically shifts its effective heating position from the lower chamber to the upper chamber over time, allowing the collection region to move accordingly. This dynamic approach enables efficient utilization of the entire internal chamber space while maintaining a relatively simple collection mechanism, resolving the contradiction between simplicity and space utilization efficiency.
Solution Approach 2:
The patent employs parameter changes by varying the heating temperature in time series to shift the collection region. By changing the temperature parameter over time, the system moves the active collection zone from lower to upper regions of the chamber. This parameter-based control achieves efficient space utilization without complicating the collection process structure, addressing the technical contradiction effectively.
2Stability of the object's composition
If the heater operates at a constant temperature, then the operation is stable and simple, but the collection region remains fixed causing frequent blockages
Solution Approach 1:
The patent applies periodic action by implementing time-series temperature variation of the heater. Instead of constant temperature operation, the heater periodically cycles through different temperature levels, which causes the collection region to move systematically from lower to upper chamber regions. This periodic temperature modulation prevents by-product accumulation in any single location, thereby preventing blockages while maintaining operational stability through controlled cycling.
Solution Approach 2:
The system transitions from static constant temperature operation to dynamic time-series temperature variation. This dynamic approach allows the collection region to move over time, preventing localized blockages that would occur with fixed temperature operation. The dynamic temperature control maintains operational stability while significantly improving continuous operation reliability by eliminating the blockage problem.
3Productivity
If multiple collecting members are disposed at different positions, then the space utilization is improved, but the device complexity increases
Solution Approach 1:
The patent applies universality by designing collecting members that can effectively collect by-products from multiple chamber regions through time-series operation. Instead of requiring separate dedicated collecting members for each region, the system uses movable heating regions to bring the collection function to different locations. This multi-functional approach achieves efficient space utilization while avoiding the complexity of multiple fixed collecting members positioned throughout the chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively utilizes the internal space by shifting the collection region based on varying heating temperatures, reducing the frequency of maintenance and repair operations by preventing blockages and optimizing the collection process.
Implementation Method 1
a heater disposed on a gas inlet side of an internal space within the chamber and configured to vary a heating temperature in time series
Implementation Method 2
a vortex forming member disposed around the heater
Data Source
AI summary
An apparatus for collecting a by-product, includes: a chamber provided with a gas inlet and a gas outlet and having an internal space; a heater disposed on the gas inlet side of the internal space within the chamber and varying a heating temperature in time series; a vortex forming member disposed around the heater; a plurality of first collecting members disposed below the heater; a second collecting member disposed below the first collecting member so that a plurality of second collecting members intersect each other; and a third collecting member disposed on the gas outlet side of the internal space within the chamber.