Bypass Flow Switch Valve for Plug-Resistant Hazardous Fluid Control
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Solution Overview
Problem
Existing fluid systems used in semiconductor processing often rely on flow-limiting devices that can impose operational constraints and are prone to plugging, while vent and inert/diluent flows, although effective, increase operating costs due to higher flow rates than necessary.
Innovation Solution
A flow control arrangement comprising a housing with an inlet and outlet conduit, an isolation valve, a flow switch, and a bypass switch that adjusts the flow rate by coupling or decoupling the isolation valve based on the flow rate of the fluid, allowing for reduced flow rates during processing and increased rates during qualification or service events, thereby optimizing fluid flow and reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If flow-limiting devices (restrictors and orifice plates) are used to limit hazardous material flow, then safety is improved, but reliability deteriorates due to plugging
Solution Approach 1:
The patent extracts the flow-limiting function from a separate replaceable flow limiter component and integrates it into the valve body itself. The valve incorporates an internal orifice or flow restriction feature directly in its design, eliminating the need for separate restrictors that can plug and require replacement. This integration maintains safety while improving reliability.
Solution Approach 2:
The patent combines multiple functions into a single integrated valve assembly: flow control, flow limitation, and isolation functionality are merged into one component. This eliminates the need for multiple separate devices (restrictors, orifice plates, valves) that could fail independently, thereby improving system reliability while maintaining hazardous material flow limits.
2Object-affected harmful factors
If vent flows and inert/diluent flows are increased to limit risk, then safety is improved, but operating costs increase
Solution Approach 1:
The patent incorporates flow sensors and control systems that continuously monitor fluid flow and automatically adjust vent and inert/diluent flow rates based on actual process conditions. This feedback mechanism ensures adequate safety margins are maintained while minimizing excessive flow rates that would increase operating costs.
Solution Approach 2:
The patent uses dynamically adjustable flow control mechanisms that can adapt vent and inert/diluent flow rates in real-time based on process requirements. Rather than maintaining constantly high flow rates for safety, the system dynamically adjusts to the minimum necessary levels, reducing energy loss and operating costs while maintaining safety.
3Object-affected harmful factors
If flow-limiting devices are used to control fluid flow, then safety is improved, but device complexity increases due to operational constraints
Solution Approach 1:
The patent designs a universal valve assembly that performs multiple functions: flow control, flow limitation, isolation, and monitoring. This multi-functional design eliminates the need for multiple separate devices and reduces operational constraints, thereby improving safety while reducing overall system complexity.
Solution Approach 2:
The patent segments the flow control system into modular components with standardized interfaces, allowing for easier maintenance and operation. The valve assembly is designed as a self-contained module that integrates flow limitation and control functions, reducing the complexity of system assembly and operation while maintaining safety requirements.
Data Source
AI summary
A flow control arrangement includes a housing seating inlet and outlet conduits, an isolation valve arranged within the housing and is connected to the inlet conduit, a flow switch, and a bypass switch. The flow switch has a shutoff trigger, is arranged within the housing, and couples the isolation valve to the outlet conduit. The bypass switch is coupled to the isolation valve and has first and second positions. The flow switch is operably coupled to the isolation valve when the bypass switch is in the first position to close the isolation valve when flow rate of fluid traversing the flow switch rises above the shutoff trigger, and is operably decoupled from the isolation valve when the bypass switch is in the second position to flow fluid through the flow switch at flow rates greater than the shutoff trigger. Semiconductor processing systems and related flow control methods are also described.