C-Shaped Probe Test Head for Stable EDS Movement
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Solution Overview
Problem
Existing probe structures in EDS processes experience unstable movement and susceptibility to foreign matter attachment due to spacing between lower and upper plates, leading to degradation of the displacement portion and reduced durability.
Innovation Solution
A test head design with a probe having a 'C' or inverted 'C' shape, surrounded by lower and upper plates, and featuring a displacement portion with specific curvature and displacement holes, ensuring stable movement and protection against foreign matter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the lower plate and upper plate are spaced apart to allow probe movement, then the probe can move during EDS process, but unstable movement occurs and foreign matter can attach
Solution Approach 1:
The patent introduces a film structure that covers the space between the lower plate and upper plate, creating a flexible barrier that prevents foreign matter attachment while allowing the probe to move. The film acts as a protective barrier that maintains the functional spacing needed for probe operation without exposing the interior space to external contaminants.
2Ease of operation
If the lower plate and upper plate are spaced apart, then probe movement is enabled, but the displacement portion degrades rapidly
Solution Approach 1:
The film structure protects the displacement portion from direct exposure to the external environment during probe movement. This protective barrier reduces degradation from environmental factors while maintaining the necessary movement capability, thereby extending the service life of the displacement portion.
Solution Approach 2:
The film creates a protected interior environment that isolates the displacement portion from harmful external factors. This effectively creates an inert protective zone that reduces chemical and physical degradation, extending the durability of the displacement portion while allowing operational movement.
3Ease of operation
If the lower plate and upper plate are spaced apart, then probe movement is possible, but foreign matter attachment occurs
Solution Approach 1:
The film acts as a physical barrier that prevents foreign matter from entering the space between the lower plate and upper plate where the probe moves. This protective barrier eliminates the harmful effect of foreign matter attachment while preserving the operational spacing required for probe function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Stabilizes probe movement, prevents foreign matter attachment, and enhances the durability of the displacement portion during the EDS process.
Implementation Method 1
the probe 30 is pressed through the space converter 450 and the semiconductor substrate 480 to cause the buckling of the elastic portion 5
Implementation Method 2
the displacement portion 18 moves through the lower guide hole 45 of the lower plate 50 and the upper guide hole 85 of the upper plate 70, causing reaction force F1 and side reaction force F2
Data Source
AI summary
Disclosed is a test head including a probe located in the form of a pin from a semiconductor substrate toward a space converter, the probe having a displacement portion and an elastic portion located near the space converter and the semiconductor substrate, respectively, and a lower plate and an upper plate sequentially located in a longitudinal direction of the probe, the lower plate and the upper plate being configured to surround the displacement portion, wherein the probe has a “C” shape or an inverted “C” shape at the displacement portion.