C-Shaped Susceptor Complementary Portion for Uniform Substrate Heating
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Solution Overview
Problem
Existing substrate heat treatment apparatuses using radiant heat from a heating unit often result in nonuniform in-plane temperature distribution of substrates during high-temperature heating.
Innovation Solution
A substrate heat treatment apparatus featuring a C-shaped susceptor with a complementary portion forming an annular shape, supported by a susceptor support portion, and a heating unit positioned above to provide uniform heating, with a moving unit to adjust the substrate stage's distance from the heat radiation surface, ensuring even heat distribution around the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If radiant heat from a heating unit is used to quickly heat a substrate to high temperature, then heating speed is improved, but in-plane temperature distribution uniformity deteriorates
Solution Approach 1:
The susceptor is divided into a C-shaped susceptor and a separate complementary portion, which are positioned to form an annular shape that segments the heating zone. This segmentation allows for more uniform heat distribution across the substrate surface while maintaining rapid heating capability.
Solution Approach 2:
The invention transitions from a linear C-shaped susceptor to an annular (ring-shaped) configuration by adding the complementary portion. This dimensional change creates a closed-loop structure that surrounds the substrate, enabling uniform radiant heat distribution from all directions and improving in-plane temperature uniformity while maintaining fast heating speed.
2Ease of operation
If a C-shaped susceptor is used, then ease of substrate placement is improved, but heat distribution uniformity deteriorates due to the opening portion
Solution Approach 1:
The susceptor system is segmented into two independent components: the C-shaped susceptor that provides ease of substrate placement, and the separate complementary portion that closes the opening. This segmentation allows each component to fulfill its specific function while working together to achieve uniform heat distribution.
Solution Approach 2:
The complementary portion acts as an intermediary element that bridges the gap in the C-shaped susceptor. It is positioned to complete the annular shape without interfering with substrate placement, thereby maintaining ease of operation while eliminating the heat distribution non-uniformity caused by the opening portion.
3Use of energy by moving object
If the susceptor is supported close to the substrate, then heat transfer efficiency is improved, but substrate access difficulty increases
Solution Approach 1:
The susceptor support system is designed to be dynamic rather than fixed. The susceptor can be positioned at different heights and angles, allowing it to be close to the substrate during heating for efficient heat transfer, and easily accessible when positioned away from the substrate for loading and unloading operations.
Solution Approach 2:
The support structure utilizes vertical positioning to resolve the contradiction. By moving the susceptor in the vertical dimension, the system achieves close proximity to the substrate for efficient heat transfer during operation, while maintaining easy horizontal access for substrate placement and removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly improves the uniformity of the in-plane temperature distribution of substrates during quick heating, preventing heat escape and maintaining consistent temperatures across the substrate.
Implementation Method 1
a heating unit, including a heat radiation surface at a position above the substrate stage at which the heat radiation surface faces the second substrate placement portion, configured to heat the substrate placed on the second substrate placement portion by heat from the heat radiation surface
Data Source
AI summary
An apparatus includes a C-shaped susceptor including a first substrate placement portion capable of placing the substrate, and an opening portion, a substrate stage including a second substrate placement portion capable of placing the substrate, and a susceptor support portion configured to support the susceptor, and a complementary portion formed separately from the susceptor support portion, engaged with the susceptor support portion, and configured to complement an opening portion of the susceptor to form the susceptor into an annular shape in a state in which the susceptor support portion supports the susceptor. When the substrate is placed on the second substrate placement portion and the second substrate placement portion is located at a predetermined distant position with respect to the heat radiation surface, the susceptor forms the annular shape together with the complementary portion to surround the substrate.