Calibratable Beam Shaping System Alignment

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Solution Overview

Problem

Existing beam shaping techniques for coherent light beams, especially those with short wavelengths like UV and Deep UV, face challenges in achieving high precision and high energetic efficiency, with refractive and diffractive methods being susceptible to alignment issues and attenuating methods having low energetic efficiency, leading to significant energy losses and reduced Signal to Noise Ratio (SNR) in scanning systems.

Innovation Solution

A calibratable intensity and phase beam shaper system using refractive and/or diffractive optical elements, where the optical modules are independently aligned and calibrated using separate alignment modules and a calibration method that sequentially adjusts the lateral positions and orientations of the intensity redistribution and phase corrector modules, improving alignment accuracy and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If refractive and diffractive beam shaping techniques are used, then beam shaping precision is improved, but alignment sensitivity increases making the system susceptible to misalignment

Engineering Contradiction:
Improvebeam shaping precisionVSAvoidalignment sensitivity
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

A calibration module is introduced as an intermediary component between the light source and the beam shaping optical elements. This calibration module includes reference markers and detection means that mediate the alignment process, enabling precise positioning of the optical elements without direct manual alignment, thus resolving the contradiction between high precision shaping and alignment sensitivity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces manual mechanical alignment with an automated optical calibration system. Instead of relying on mechanical adjustment mechanisms that are prone to misalignment, the system uses optical feedback from the calibration module to automatically determine and correct the positions of beam shaping elements, eliminating the alignment sensitivity problem while maintaining high precision

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If attenuating beam shaping techniques using neutral density filters are used, then beam intensity distribution is improved, but energetic efficiency decreases leading to significant energy losses

Engineering Contradiction:
Improveintensity distribution controlVSAvoidenergetic efficiency
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The patent changes the fundamental parameter of beam shaping from intensity attenuation to phase modulation. Instead of using neutral density filters that absorb light and cause energy loss, the system uses phase modulating optical elements that reshape the beam through phase changes alone, achieving the desired intensity distribution at the output without energy loss, thus resolving the contradiction between intensity control and energetic efficiency

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If attenuating beam shaping techniques are used, then intensity distribution is improved, but Signal to Noise Ratio in scanning systems deteriorates

Engineering Contradiction:
Improveintensity distributionVSAvoidSignal to Noise Ratio
Core Design Contradiction:
Manufacturing precisionVSLoss of information

Solution Approach 1:

The system changes from attenuation-based shaping to phase-modulation-based shaping. By using phase modulating elements instead of absorbing filters, the total light energy is preserved and redirected to form the desired intensity pattern, maintaining a high Signal to Noise Ratio in scanning applications while achieving precise intensity distribution control

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high energetic efficiency (up to 95%) and improved precision in shaping coherent light beams, enhancing the Signal to Noise Ratio (SNR) in scanning systems and enabling precise applications with short wavelength light.

Implementation Method 1

Techniques, based on refractive and/or diffractive beam shaping components

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

Techniques, based on refractive and/or diffractive beam shaping components

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS9690105B2Calibratable beam shaping system and method
Publication Date: 2017.06.27 APPL MATERIALS ISRAEL LTD
  • US9690105B2 patent drawing
  • US9690105B2 patent drawing
  • US9690105B2 patent drawing

AI summary

A beam shaping system including: a first and second optical modules that are accommodated in a spaced-apart relationship in an optical path of light through the system to sequentially apply beam shaping to light incident thereon. The beam shaping system includes first and second alignment modules respectively carrying the first and second optical modules and operable for laterally positioning the optical modules with respect to the optical path. A calibration module of the beam shaping system is connectable to the first and second alignment modules and is operable to sequentially calibrate and align the respective lateral positions of the first and second optical modules with respect to the optical path. The system thereby enables shaping of an incoming light beam of given predetermined wave-front and lateral intensity distribution to form an output light beam having desired wave-front and desired lateral intensity distribution.