Calibratable Magnetic Field Sensor Lateral Offset
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Solution Overview
Problem
Process variations during semiconductor manufacturing lead to inaccurate calibration of vertical Hall sensor elements due to deviations in the distance between the sensor and the exciting conductor, resulting in unreliable sensitivity measurements.
Innovation Solution
A lateral offset of the exciting conductor from its central position is implemented, allowing the magnetic flux density to be calibrated independently of vertical process tolerances, ensuring that the calibration component changes by less than 5% within the tolerance range for the vertical distance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the exciting conductor is positioned directly above the Hall sensor element at a vertical distance h0, then the magnetic flux density can be specified based on the distance, but process variations cause the actual distance to deviate from the ideal value, leading to inaccurate calibration
Solution Approach 1:
The patent transitions from a purely vertical alignment (one dimension) to a lateral offset configuration (adding horizontal dimension). By positioning the exciting conductor laterally offset from the center of the Hall sensor element rather than directly above it, the system creates a geometric arrangement where the magnetic flux density becomes less sensitive to vertical distance variations, thus resolving the contradiction between calibration accuracy and manufacturing precision.
Solution Approach 2:
The patent changes the geometric parameters of the sensor-conductor system by introducing a lateral offset distance d1. This parameter change transforms the magnetic flux density relationship from being highly sensitive to vertical distance h0 to being more stable within the tolerance range, allowing accurate calibration despite manufacturing variations in the vertical dimension.
2Measurement precision
If a lateral offset d1 is introduced to reduce sensitivity to vertical distance variations, then calibration accuracy improves within the tolerance range, but the exciting conductor is no longer positioned at the optimal central location
Solution Approach 1:
The patent optimizes the lateral offset parameter d1 to achieve a balance between calibration stability and device simplicity. By carefully selecting the offset distance based on the tolerance range Δh1, the system achieves reduced sensitivity to vertical variations without requiring complex positioning mechanisms, thus resolving the contradiction between measurement precision and device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise calibration of the magnetic field sensor, minimizing the impact of manufacturing process variations on sensitivity measurements and maintaining accuracy even without knowledge of the exact vertical dimensions.
Implementation Method 1
an exciting conductor arrangement 16 having at least one exciting conductor 16-1, the exciting conductor being arranged within an exciting conductor plane E1 which is spaced apart, in parallel with the substrate surface 12a, from the vertical Hall sensor element 14 at a vertical distance h1
Implementation Method 2
a vertical Hall sensor element 14 arranged in a semiconductor substrate 12... a change in the Hall voltage, which is caused by a change in the magnetic flux density in the sensor element
Data Source
AI summary
Magnetic field sensor having a vertical Hall sensor element arranged in a semiconductor substrate, and an exciting conductor arrangement having at least one exciting conductor, the exciting conductor being arranged within an exciting conductor plane which is spaced apart, in parallel to the substrate surface, from the vertical Hall sensor element at a vertical distance h1 having a tolerance range Δh1 which is due to the manufacturing process, and which exciting conductor further has a lateral distance d1 as an offset from a center position which is located, in relation to the substrate surface, perpendicularly to the vertical Hall sensor element, and the lateral distance d1 being dimensioned such that a vertical calibration component B1x of a magnetic flux density B1 created by the exciting conductor arrangement in the vertical Hall sensor element changes by less than 5% within the tolerance range Δh1 for the vertical distance h1.