Calibration Chuck Horizontal Viewing Structure
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Solution Overview
Problem
There is a need for improved calibration chucks for optical probe systems to facilitate accurate calibration and testing of optical devices, particularly in ensuring precise alignment and distance measurement between optical probes and substrates while accounting for temperature-induced variations.
Innovation Solution
The optical probe systems incorporate a calibration chuck with a horizontal viewing structure that allows for vertical imaging above the calibration chuck support surface, enabling precise alignment and distance measurement through a combination of horizontal and vertical viewing structures, along with thermal control units to manage temperature-related distortions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional calibration chucks are used without horizontal viewing structures, then the device complexity is reduced, but the measurement precision and alignment accuracy deteriorate
Solution Approach 1:
The patent introduces a horizontal viewing structure that enables imaging from a horizontal direction perpendicular to the optical axis, adding a new dimensional perspective to the calibration process. This allows simultaneous vertical imaging (from above) and horizontal imaging (from the side) of the optical probe and substrate, enabling precise alignment determination without increasing the fundamental calibration chuck structure.
2Measurement precision
If temperature regulation is not implemented, then the device complexity and energy consumption are reduced, but the measurement precision deteriorates due to thermal expansion and contraction
Solution Approach 1:
The patent implements temperature regulation by heating the calibration substrate to a controlled temperature (e.g., 60°C) to compensate for thermal expansion and contraction effects. This active parameter control ensures that the substrate and optical probes maintain stable dimensions during calibration, improving distance measurement accuracy despite the additional energy consumption required for heating.
3Adaptability or versatility
If multiple viewing structures are added to the calibration chuck, then the alignment capability is improved, but the device complexity increases
Solution Approach 1:
The calibration chuck is designed with multi-functional viewing structures that serve multiple purposes: the vertical imaging structure captures the optical probe from above, while the horizontal imaging structure captures the probe from the side. Both structures work together to provide comprehensive alignment information, allowing a single calibration chuck to perform multiple calibration functions without requiring separate devices.
4Reliability
If thermal expansion compensation is not considered, then the device complexity is reduced, but the reliability of measurements across varying temperatures deteriorates
Solution Approach 1:
The patent explicitly addresses thermal expansion by implementing a temperature regulation system that heats the calibration substrate to a controlled temperature. This compensates for thermal expansion and contraction effects that would otherwise cause measurement inconsistencies when the optical probe system operates across varying temperature conditions, thereby improving measurement reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures accurate calibration and testing by providing clear images of optical probes and substrates, allowing for precise alignment and distance determination, even under varying temperatures, thereby enhancing the reliability of optical probe systems.
Implementation Method 1
temperature regulation to account for thermal expansion and contraction
Data Source
AI summary
Calibration chucks for optical probe systems, optical probe systems including the calibration chucks, and methods of utilizing the optical probe systems. The calibration chucks include a calibration chuck body that defines a calibration chuck support surface. The calibration chucks also include at least one optical calibration structure that is supported by the calibration chuck body. The at least one optical calibration structure includes a horizontal viewing structure. The horizontal viewing structure is configured to facilitate viewing of a horizontally viewed region from a horizontal viewing direction that is at least substantially parallel to the calibration chuck support surface. The horizontal viewing structure also is configured to facilitate viewing of the horizontally viewed region via an imaging device of the optical probe system that is positioned vertically above the calibration chuck support surface.