Calorimetry Sensor Using Temperature-Sensitive Resistive Coating
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Solution Overview
Problem
Existing methods for measuring reaction heat in atomic layer deposition (ALD) and atomic layer etching (ALE) processes are complex and lack accuracy, particularly in tracking heat during slow reactions and ensuring process uniformity, due to limitations in infrared thermal imaging and optical pyrometry.
Innovation Solution
A calorimetry method using a porous substrate with a temperature-sensitive resistive coating in an ALD reactor, where the resistance change is monitored to determine heat changes based on a known temperature coefficient of resistance, allowing for precise measurement of reaction heat during ALD/ALE processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If infrared thermal imaging and optical pyrometry are used to measure heat during ALD/ALE processes, then measurement capability is provided, but measurement precision and accuracy deteriorate due to system complexity and calibration difficulties
Solution Approach 1:
The patent replaces complex optical measurement systems (infrared thermal imaging and optical pyrometry) with an electrical resistance-based calorimetry system. The temperature-sensitive resistive coating converts thermal changes into electrical resistance changes, which can be measured with high precision using simple electrical circuits. This substitution eliminates the need for complex optical hardware and difficult calibration procedures while achieving superior measurement accuracy.
Solution Approach 2:
The patent introduces a temperature-sensitive resistive coating as an intermediary between the ALD/ALE process and the measurement system. This coating acts as a transducer that converts thermal energy (temperature changes during deposition) into electrical resistance changes. The porous substrate provides a large surface area for this interaction, enhancing the sensitivity of the measurement while keeping the overall system simple.
2Reliability
If complex state of the art systems are used to track heat during ALD/ALE, then heat tracking capability is achieved, but ease of operation deteriorates due to precise calibration requirements
Solution Approach 1:
The patent replaces complex optical measurement systems that require precise calibration with a simple electrical resistance measurement system. The temperature-sensitive resistive coating provides a direct electrical signal proportional to temperature changes, which can be measured using standard electrical instruments without complex calibration procedures. This substitution maintains reliable heat tracking capability while dramatically improving ease of operation.
3Measurement precision
If existing calorimetry methods are used to measure reaction heat, then heat measurement is provided, but measurement precision deteriorates due to offset results and inability to map slow reactions
Solution Approach 1:
The patent employs a porous substrate for the temperature-sensitive resistive coating, which provides a large surface area to volume ratio. This enhanced surface area improves the sensitivity of the calorimetry sensor, allowing it to detect small temperature changes associated with slow ALD/ALE reactions. The porous structure allows better thermal coupling between the deposition process and the sensing element, eliminating offset results and improving measurement precision for slow reactions.
Solution Approach 2:
The patent utilizes the temperature coefficient of resistance (TCR) parameter of the resistive coating to convert temperature changes into electrical resistance changes. By monitoring resistance changes over time, the system can accurately track the heat evolution during slow ALD/ALE reactions. This parameter transformation enables precise detection of slow reaction kinetics that would be difficult to measure with conventional thermal imaging methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides accurate and sensitive measurement of reaction heat, enhancing process optimization, precursor selection, and utilization, especially for complex high aspect ratio features and multilevel integrated circuit applications.
Implementation Method 1
determining a change in temperature associated with the depositing based on the monitored resistance of the calorimetry sensor and a known temperature coefficient of resistance for the calorimetry sensor
Data Source
AI summary
A calorimetry sensor having a porous substrate and a temperature sensitive resistive coating. The calorimetry sensor has a known temperature coefficient of resistance. A process utilizes the known temperature coefficient of resistance and monitors changes in resistance of the calorimetry sensor to determine changes in temperature (heat) within an environment, such as during reactions within an ALD reactor.