Cam-Guided Chamber Lid Movement Without Gantry Hoists

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Solution Overview

Problem

Conventional semiconductor production systems require significant space and incur high costs due to gantry-hoist arrangements for lifting and maintaining lids of substrate handling chambers, necessitating periodic certification and inspection.

Innovation Solution

A lid moving system utilizing a base member, cam surfaces, pivotal connections, and a motor-driven traveler member to safely and efficiently open and close chamber lids, reducing the need for gantry-hoists.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If gantry-hoist arrangements are used for lid movement, then reliable lid movement is achieved, but space requirements and operational costs increase significantly

Engineering Contradiction:

Improvelid movement reliabilityVSAvoidspace requirements

Core Design Contradiction:

ReliabilityVSArea of stationary object

Solution Approach 1:

The lid moving system is divided into separate functional components: a lid mounting arm for holding the lid, a traveler member with cam surfaces for guided movement, and a motor for actuation. This segmentation allows each component to be optimized independently and reduces the overall space footprint compared to a monolithic gantry structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system transitions from horizontal gantry movement to vertical lid movement through the cam mechanism. The traveler member moves vertically along the lid mounting arm while the cam surfaces convert this vertical motion into the appropriate lid movement trajectory, utilizing the vertical dimension to reduce horizontal space requirements.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Reliability

If gantry-hoist arrangements are used for lid movement, then lid movement is achieved, but device complexity and maintenance costs increase

Engineering Contradiction:

Improvelid movement capabilityVSAvoidsystem complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The complex gantry and hoist mechanisms are extracted and replaced with a simplified system consisting of a lid mounting arm, traveler member with cam surfaces, and motor. This extraction removes unnecessary structural elements while retaining the essential lid movement function.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The mechanical gantry-hoist system is replaced with a cam-based mechanical system. The cam surfaces on the traveler member provide guided movement and force multiplication, eliminating the need for complex hoist mechanisms and reducing overall system complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If conventional lid movement systems are used, then sealing is maintained, but access to chamber interior is limited

Engineering Contradiction:

Improvesealing integrityVSAvoidaccessibility

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The lid is lifted vertically away from the chamber opening before being moved to the stowed position. This preliminary vertical lifting action breaks the seal in a controlled manner, allowing subsequent horizontal movement of the lid to a convenient stowed location that provides excellent access to the chamber interior.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The lid mounting arm is designed to be movable, allowing the lid to transition dynamically between the closed position (maintaining seal), an intermediate lifted position (breaking seal for access), and a stowed open position (providing full access). This dynamic positioning capability enhances accessibility while maintaining sealing integrity when closed.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system minimizes space requirements and lowers maintenance costs by providing a reliable and efficient method for lid movement, eliminating the need for gantry-hoists and reducing the complexity of substrate processing system maintenance.

Implementation Method 1

A lid moving system may include a base member, side walls extending from the base member, each including a cam surface defined therein

Methodology Applied

Scientific EffectCam mechanism: Cam

Data Source

PatentUS12610775B2Lid moving systems and methods for chambers and containers

Publication Date: 2026.04.21 ASM IP HLDG BV

AI summary

Lid moving systems and methods facilitate reliable and safe movement of lids for chambers. Such systems may include: (a) a base member; (b) side walls extending from the base member with each including a cam surface defined therein; (c) a lid mounting arm extending away from the base member; (d) a first pivotal connection system engaging the cam surfaces and pivotally engaging the lid mounting arm; (e) a traveler member including a recess or opening on a surface facing the base member; (f) a second pivotal connection system pivotally engaging the traveler member with the lid mounting arm; (g) a motor for moving the traveler member (causing movement of the lid mounting arm with respect to the side walls); and/or (h) a stopper mechanism extending into the recess or opening of the traveler member from a direction of the surface facing the base member when the lid is opened.