Cam-Expandable Precursor Tray Assembly for Ampoule Heat Contact
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Solution Overview
Problem
Existing precursor delivery systems face challenges in efficiently delivering vapor precursors from solid materials while ensuring ease of installation and removal from ampoules, as well as maintaining thermal contact for effective heat transfer.
Innovation Solution
A configurable tray assembly comprising a first and second tray portion, coupled by a retainer and engageable with a cam member, allowing for expansion and collapse configurations to facilitate insertion and removal, and enhance thermal contact with ampoule walls.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the tray assembly uses a fixed rigid structure, then structural strength is maintained, but ease of installation and removal from ampoules deteriorates
Solution Approach 1:
The tray assembly incorporates a cam mechanism that enables dynamic transformation between expanded and collapsed configurations. The cam member, when rotated, engages with slot members on the tray portions to drive the transformation, allowing the rigid tray structure to adapt its state for different operational phases (installation, thermal contact, removal).
Solution Approach 2:
The tray assembly is divided into multiple tray portions (first tray portion and second tray portion) that can be coupled together by retainers. These segmented portions can independently engage with the cam mechanism, allowing modular transformation and simplified installation/removal operations while maintaining structural integrity during vapor precursor delivery.
2Temperature
If the tray assembly is in expanded configuration for thermal contact, then heat transfer efficiency is improved, but ease of removal from ampoules deteriorates
Solution Approach 1:
The cam mechanism enables reversible transformation between expanded and collapsed configurations. During the vapor precursor delivery phase, the cam is positioned to maintain the tray assembly in the expanded configuration for optimal thermal contact with the ampoule. For removal operations, the cam is rotated to transform the tray assembly to the collapsed configuration, reducing its profile and facilitating easy extraction from the ampoule.
Solution Approach 2:
The tray assembly undergoes periodic transformation between expanded and collapsed states controlled by the cam mechanism. The expansion phase enables thermal contact for vapor precursor delivery, while the collapse phase enables removal operations. This periodic action between two distinct states resolves the contradiction between maintaining thermal contact and enabling easy removal.
3Ease of operation
If the tray assembly uses a collapsible structure for easy insertion, then ease of operation is improved, but structural strength deteriorates
Solution Approach 1:
The tray assembly maintains structural strength through its rigid tray portions and retainer connections, while the cam mechanism provides controlled dynamic transformation. The slot members and cam engagement geometry are designed to transmit forces effectively during transformation, ensuring that structural integrity is maintained even as the assembly transitions between expanded and collapsed states for easy insertion and removal operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tray assembly enables easy installation and removal from ampoules while maintaining thermal contact, enhancing heat transfer and vapor precursor delivery efficiency.
Implementation Method 1
the first tray portion and the second tray portion are configurable between an expanded configuration and a collapsed configuration based on an orientation of the cam member
Implementation Method 2
in the expanded configuration, the first tray portion and the second tray portion push against an inner wall surface of the ampoule so as to be in thermal contact with the ampoule
Implementation Method 3
the retainer comprises at least one of an elastomeric band, a compressible ring, a circular spring, or any combination thereof
Data Source
AI summary
A tray assembly comprises a plurality of trays. Each of the plurality of trays comprises a first tray portion and a second tray portion which are couplable together by a retainer and which are engageable with a cam member. Depending on the orientation of the cam member, each of the plurality of trays of the tray assembly is configurable between an expanded configuration and a collapsed configuration. In the collapsed configuration, the tray assembly is insertable into an ampoule. In the expanded configuration, the tray assembly is removable from an ampoule.